Measuring Plasticity in Confined Cu Thin Films at Different Geometries

We report quantitative measurement of plasticity in confined Cu thin films with a new micro-pillar testing protocol. Polycrystalline Cu and CrN thin films were sequentially sputter deposited onto Si (100) substrates, forming thin film assemblies in which polycrystalline Cu thin films of various thic...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Key Engineering Materials 2015-07, Vol.651-653, p.987-992
Hauptverfasser:	Mu, Yang, Meng, Wen Jin
Format:	Artikel
Sprache:	eng
Schlagworte:	Compressing Copper DEFORMATION MEASUREMENT Metal films Plasticity Silicon substrates Thickness THIN FILMS
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!