Monolithic integration of a 16-channel VMUX on SOI platform

A 16-channel variable attenuator multiplexer/demultiplexer （VMUX） device is demonstrated. The VM UX is based on a rib-type structure on a silicon-on-insulator （SOI） platform. It consists of a 100-GHz arrayed waveguide grating （AWG） and an electro-optic variable optical attenuator （VOA） array with a p-i-n lateral diode structure. The insertion loss of the demonstrated device is about 9.1 dB and the corresponding crosstalk is about 10 dB. The injected current of the VOA is 60.74 mA at 20 dB attenuation and the whole area of the device is 2.9 × 1 mm2. The VMUX performs an excellent function of wavelength demultiplexing and optical power balancing in 16 channels.