Emission and absorption spectroscopy study of Ar excited states in 13.56MHz argon plasma operating at sub-atmospheric to atmospheric pressure

The densities of metastable and resonant states of Ar atoms are measured in high pressure Ar radio frequency discharge. Resonant absorption spectroscopy for the case of a low pressure spectral lamp and high-pressure plasma absorption lines is implemented for this purpose. The necessary generalizatio...

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Veröffentlicht in:	Spectrochimica acta. Part B: Atomic spectroscopy 2015-05, Vol.107, p.75-85
Hauptverfasser:	Li, L., Nikiforov, A., Britun, N., Snyders, R., Leys, C.
Format:	Artikel
Sprache:	eng
Schlagworte:	Absorption spectroscopy Argon plasma Atmospheric pressure Atmospheric pressure RF discharge Density Deviation Emission analysis Excitation spectra Fabry–Perot interferometry Lamps Metastable level density Optical emission Resonant optical absorption
Online-Zugang:	Volltext
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