Surface Tension Driven Flow in a Low Molecular Weight Photopolymer

Low molecular weight photopolymers are candidate materials for resists in Extreme Ultraviolet Lithography. The patterned chemical transformations used in photolithography generate a surface energy pattern that can induce flow in low molecular weight photopolymers via the Marangoni effect, due to the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of Photopolymer Science and Technology 2015/06/23, Vol.28(1), pp.67-71
Hauptverfasser:	Kim, Chae Bin, Zhou, Sunshine X., Heilman, Drew L., Janes, Dustin W., Ellsion, Christopher J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Convection Diffusion Lithography Low molecular weights Marangoni Masks Patterning Photopolymer Photopolymers Polymers Surface energy Surface tension Thickness Thin Film
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!