Development of High-Reflective W/Si-multilayer Diffraction Grating for the Analysis of Fluorine Materials

For the analysis of fluorine materials and 3d transition metals by soft-x-ray absorption spectroscopy, A new diffraction grating with multilayer coating was installed at the BL-10 beamline of the NewSUBARU synchrotron light source. The target photon energy range of this grating is from 500 eV to 1,0...

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Veröffentlicht in:	Journal of Photopolymer Science and Technology 2015/05/11, Vol.28(4), pp.531-536
Hauptverfasser:	Kuki, Masaki, Uemura, Tomoyuki, Yamaguchi, Masato, Harada, Tetsuo, Watanabe, Takeo, Muramatsu, Yasuji, Kinoshita, Hiroo
Format:	Artikel
Sprache:	eng
Schlagworte:	Coating Diffraction gratings Fluorine Multilayers Reflectance Reflectivity soft x-ray absorption spectroscopy synchrotron light Three dimensional Transition metals W/Si multilayer wideband multilayer grating
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