Secondary particle emission from sapphire single crystal
Secondary ion emission from sapphire single crystal has been studied experimentally and by means of computer simulation. The particular oscillations of secondary ion energy spectra and two specific maxima of O+ and Al+ ions were observed under irradiation of (0001) sapphire face by 1 and 10keV Ar+ i...
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| Veröffentlicht in: | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2015-07, Vol.354, p.159-162 |
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| container_title | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms |
| container_volume | 354 |
| creator | Minnebaev, K.F. Khvostov, V.V. Zykova, E.Yu Tolpin, K.A. Colligon, J.S. Yurasova, V.E. |
| description | Secondary ion emission from sapphire single crystal has been studied experimentally and by means of computer simulation. The particular oscillations of secondary ion energy spectra and two specific maxima of O+ and Al+ ions were observed under irradiation of (0001) sapphire face by 1 and 10keV Ar+ ions. We have explained this by the interplay of the charge exchange processes between moving particles and solids. The existence of two maxima in energy spectra of O+ and Al+ secondary ions can be also connected with special features of single-crystal sputtering: the low-energy peak can be formed by random sputtering and the high-energy peak from focusing collisions. In addition some similarity was found between the positions of low-energy maximum in energy spectra of Al+ ions emitted from sapphire and the principal maxima of Al+ ions ejected from the aluminum single crystal. This indicates a possibility to explain the presence of low-energy maximum in energy spectra of secondary ions ejecting from sapphire by emission of Al+ ions from aluminum islands appearing in a number of cases on the sapphire surface due to preferential sputtering of oxygen. These different mechanisms of creating the energy spectra of ions emitted from sapphire should be taken in account. |
| doi_str_mv | 10.1016/j.nimb.2014.11.058 |
| format | Article |
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The particular oscillations of secondary ion energy spectra and two specific maxima of O+ and Al+ ions were observed under irradiation of (0001) sapphire face by 1 and 10keV Ar+ ions. We have explained this by the interplay of the charge exchange processes between moving particles and solids. The existence of two maxima in energy spectra of O+ and Al+ secondary ions can be also connected with special features of single-crystal sputtering: the low-energy peak can be formed by random sputtering and the high-energy peak from focusing collisions. In addition some similarity was found between the positions of low-energy maximum in energy spectra of Al+ ions emitted from sapphire and the principal maxima of Al+ ions ejected from the aluminum single crystal. This indicates a possibility to explain the presence of low-energy maximum in energy spectra of secondary ions ejecting from sapphire by emission of Al+ ions from aluminum islands appearing in a number of cases on the sapphire surface due to preferential sputtering of oxygen. These different mechanisms of creating the energy spectra of ions emitted from sapphire should be taken in account.</description><identifier>ISSN: 0168-583X</identifier><identifier>EISSN: 1872-9584</identifier><identifier>DOI: 10.1016/j.nimb.2014.11.058</identifier><language>eng</language><publisher>Elsevier B.V</publisher><subject>Aluminum ; Computer simulation ; Ejection ; Energy spectra ; Low energy ; Maxima ; Sapphire ; Secondary ion emission ; Semiconductors ; Single crystals ; Sputtering</subject><ispartof>Nuclear instruments & methods in physics research. 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This indicates a possibility to explain the presence of low-energy maximum in energy spectra of secondary ions ejecting from sapphire by emission of Al+ ions from aluminum islands appearing in a number of cases on the sapphire surface due to preferential sputtering of oxygen. These different mechanisms of creating the energy spectra of ions emitted from sapphire should be taken in account.</description><subject>Aluminum</subject><subject>Computer simulation</subject><subject>Ejection</subject><subject>Energy spectra</subject><subject>Low energy</subject><subject>Maxima</subject><subject>Sapphire</subject><subject>Secondary ion emission</subject><subject>Semiconductors</subject><subject>Single crystals</subject><subject>Sputtering</subject><issn>0168-583X</issn><issn>1872-9584</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2015</creationdate><recordtype>article</recordtype><recordid>eNp9UMFKxDAQDaJgXf0BTz16ac0kTZuCF1l0FRY8uAdvIZtONUvb1KQr7N-bUs_OZWDmvTfzHiG3QHOgUN4f8sH2-5xRKHKAnAp5RhKQFctqIYtzkkSQzITkH5fkKoQDjSW4SIh8R-OGRvtTOmo_WdNhir0Nwbohbb3r06DH8ct6TIMdPuPW-FOYdHdNLlrdBbz56yuye37arV-y7dvmdf24zUxB-ZRxLpgsS90YVsWbmmJjpOC0kBXXhYaqbuNcQiNFjdDKtp5hrNxjKfaAfEXuFtnRu-8jhknF5wx2nR7QHYOKApxJAaKKULZAjXcheGzV6G0fnSmgak5JHdSckppTUgAqphRJDwsJo4cfi14FY3Ew2ETLZlKNs__RfwEvvG-a</recordid><startdate>20150701</startdate><enddate>20150701</enddate><creator>Minnebaev, K.F.</creator><creator>Khvostov, V.V.</creator><creator>Zykova, E.Yu</creator><creator>Tolpin, K.A.</creator><creator>Colligon, J.S.</creator><creator>Yurasova, V.E.</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20150701</creationdate><title>Secondary particle emission from sapphire single crystal</title><author>Minnebaev, K.F. ; Khvostov, V.V. ; Zykova, E.Yu ; Tolpin, K.A. ; Colligon, J.S. ; Yurasova, V.E.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c403t-3352866adc27000a0edc85304873a4a179f70081d859e1f8f9700026be65b1e3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2015</creationdate><topic>Aluminum</topic><topic>Computer simulation</topic><topic>Ejection</topic><topic>Energy spectra</topic><topic>Low energy</topic><topic>Maxima</topic><topic>Sapphire</topic><topic>Secondary ion emission</topic><topic>Semiconductors</topic><topic>Single crystals</topic><topic>Sputtering</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Minnebaev, K.F.</creatorcontrib><creatorcontrib>Khvostov, V.V.</creatorcontrib><creatorcontrib>Zykova, E.Yu</creatorcontrib><creatorcontrib>Tolpin, K.A.</creatorcontrib><creatorcontrib>Colligon, J.S.</creatorcontrib><creatorcontrib>Yurasova, V.E.</creatorcontrib><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Minnebaev, K.F.</au><au>Khvostov, V.V.</au><au>Zykova, E.Yu</au><au>Tolpin, K.A.</au><au>Colligon, J.S.</au><au>Yurasova, V.E.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Secondary particle emission from sapphire single crystal</atitle><jtitle>Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms</jtitle><date>2015-07-01</date><risdate>2015</risdate><volume>354</volume><spage>159</spage><epage>162</epage><pages>159-162</pages><issn>0168-583X</issn><eissn>1872-9584</eissn><abstract>Secondary ion emission from sapphire single crystal has been studied experimentally and by means of computer simulation. The particular oscillations of secondary ion energy spectra and two specific maxima of O+ and Al+ ions were observed under irradiation of (0001) sapphire face by 1 and 10keV Ar+ ions. We have explained this by the interplay of the charge exchange processes between moving particles and solids. The existence of two maxima in energy spectra of O+ and Al+ secondary ions can be also connected with special features of single-crystal sputtering: the low-energy peak can be formed by random sputtering and the high-energy peak from focusing collisions. In addition some similarity was found between the positions of low-energy maximum in energy spectra of Al+ ions emitted from sapphire and the principal maxima of Al+ ions ejected from the aluminum single crystal. This indicates a possibility to explain the presence of low-energy maximum in energy spectra of secondary ions ejecting from sapphire by emission of Al+ ions from aluminum islands appearing in a number of cases on the sapphire surface due to preferential sputtering of oxygen. These different mechanisms of creating the energy spectra of ions emitted from sapphire should be taken in account.</abstract><pub>Elsevier B.V</pub><doi>10.1016/j.nimb.2014.11.058</doi><tpages>4</tpages></addata></record> |
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| ispartof | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 2015-07, Vol.354, p.159-162 |
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| language | eng |
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| source | Elsevier ScienceDirect Journals |
| subjects | Aluminum Computer simulation Ejection Energy spectra Low energy Maxima Sapphire Secondary ion emission Semiconductors Single crystals Sputtering |
| title | Secondary particle emission from sapphire single crystal |
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