Mechanical characterization of metallic thin films by bulge and scratch testing

The mechanical properties of 20-nm thick silver, titanium and nickel-chromium alloy films encapsulated between two silicon nitride ceramic layers are investigated by bulge and scratch tests. Bulge tests are used in order to measure the yield strength of the metallic films. An unexpected strain-softe...

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Veröffentlicht in:	Surface & coatings technology 2016-03, Vol.289, p.69-74
Hauptverfasser:	Javed, Hassan, Merle, Benoit, Preiß, Eva, Hivet, Romain, Benedetto, Alessandro, Göken, Mathias
Format:	Artikel
Sprache:	eng
Schlagworte:	Adhesion Bulge test Coatings Mechanical properties Nickel base alloys Nitrides Scratch test Scratch tests Silicon nitride Silver Thin film Thin films
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