Microstructure-Based Interfacial Tuning Mechanism of Capacitive Pressure Sensors for Electronic Skin

In order to investigate the interfacial tuning mechanism of electronic skin (e-skin), several models of the capacitive pressure sensors (CPS) with different microstructures and several sizes of microstructures are constructed through finite element analysis method. The simulative pressure response,...

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Veröffentlicht in:	Journal of sensors 2016-01, Vol.2016 (2016), p.1-8
Hauptverfasser:	Yang, Weiqing, Mao, Lin, Chen, Yueqi, Chu, Wenjun, Huang, Xinjie, Deng, Weili, Tang, Qi
Format:	Artikel
Sprache:	eng
Schlagworte:	Computer simulation Copper Design Electrodes Electronics Finite element analysis Linearity Microelectromechanical systems Microstructure Polyethylene terephthalate Pressure sensors Pyramids Ratios Sensors Skin Studies Tuning
Online-Zugang:	Volltext
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