2D stepping drive for hyperspectral systems
We present the design, fabrication and characterization of a compact 2D stepping microdrive for pinhole array positioning. The miniaturized solution enables a highly integrated compact hyperspectral imaging system. Based on the geometry of the pinhole array, an inch-worm drive with electrostatic act...
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| Veröffentlicht in: | Journal of micromechanics and microengineering 2015-07, Vol.25 (7), p.74002-9 |
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| container_end_page | 9 |
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| container_issue | 7 |
| container_start_page | 74002 |
| container_title | Journal of micromechanics and microengineering |
| container_volume | 25 |
| creator | Endrödy, Csaba Mehner, Hannes Grewe, Adrian Sinzinger, Stefan Hoffmann, Martin |
| description | We present the design, fabrication and characterization of a compact 2D stepping microdrive for pinhole array positioning. The miniaturized solution enables a highly integrated compact hyperspectral imaging system. Based on the geometry of the pinhole array, an inch-worm drive with electrostatic actuators was designed resulting in a compact (1 cm2) positioning system featuring a step size of about 15 µm in a 170 µm displacement range. The high payload (20 mg) as required for the pinhole array and the compact system design exceed the known electrostatic inch-worm-based microdrives. |
| doi_str_mv | 10.1088/0960-1317/25/7/074002 |
| format | Article |
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Micromech. Microeng</addtitle><description>We present the design, fabrication and characterization of a compact 2D stepping microdrive for pinhole array positioning. The miniaturized solution enables a highly integrated compact hyperspectral imaging system. Based on the geometry of the pinhole array, an inch-worm drive with electrostatic actuators was designed resulting in a compact (1 cm2) positioning system featuring a step size of about 15 µm in a 170 µm displacement range. 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Micromech. Microeng</addtitle><date>2015-07-01</date><risdate>2015</risdate><volume>25</volume><issue>7</issue><spage>74002</spage><epage>9</epage><pages>74002-9</pages><issn>0960-1317</issn><eissn>1361-6439</eissn><coden>JMMIEZ</coden><abstract>We present the design, fabrication and characterization of a compact 2D stepping microdrive for pinhole array positioning. The miniaturized solution enables a highly integrated compact hyperspectral imaging system. Based on the geometry of the pinhole array, an inch-worm drive with electrostatic actuators was designed resulting in a compact (1 cm2) positioning system featuring a step size of about 15 µm in a 170 µm displacement range. The high payload (20 mg) as required for the pinhole array and the compact system design exceed the known electrostatic inch-worm-based microdrives.</abstract><pub>IOP Publishing</pub><doi>10.1088/0960-1317/25/7/074002</doi><tpages>9</tpages></addata></record> |
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| ispartof | Journal of micromechanics and microengineering, 2015-07, Vol.25 (7), p.74002-9 |
| issn | 0960-1317 1361-6439 |
| language | eng |
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| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | Actuators Arrays electrostatic actuation Electrostatics hyperspectral imaging inch-worm microdrive Micromechanics MOEMS Payloads Pinholes stage stepping drive Systems design Two dimensional |
| title | 2D stepping drive for hyperspectral systems |
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