An investigation on thermoelastic damping of high-Q ring resonators

For applications requiring high performance angular rate measurements it is important to be able to design MEMS rate sensors with high quality factors (Q). This paper considers ring resonator based rate sensors and investigates the influence of design changes to the ring and support legs on thermoel...

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Veröffentlicht in:	International journal of mechanical sciences 2016-02, Vol.106, p.209-219
Hauptverfasser:	Hossain, Syed T., McWilliam, Stewart, Popov, Atanas A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Circumferences Damping Dissipation Legs MEMS device Optimization Quality factor Rate gyro Resonators Ring resonator Sensors Thermoelastic damping
Online-Zugang:	Volltext
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