An improved GGNMOS triggered SCR for high holding voltage ESD protection applications

Developing an electrostatic discharge(ESD) protection device with a better latch-up immunity has been a challenging issue for the nanometer complementary metal-oxide semiconductor(CMOS) technology. In this work, an improved grounded-gate N-channel metal-oxide semiconductor(GGNMOS) transistor trigger...

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Veröffentlicht in:Chinese physics B 2015-10, Vol.24 (10), p.591-593
1. Verfasser: 张帅 董树荣 吴晓京 曾杰 钟雷 吴健
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description Developing an electrostatic discharge(ESD) protection device with a better latch-up immunity has been a challenging issue for the nanometer complementary metal-oxide semiconductor(CMOS) technology. In this work, an improved grounded-gate N-channel metal-oxide semiconductor(GGNMOS) transistor triggered silicon-controlled rectifier(SCR)structure, named GGSCR, is proposed for high holding voltage ESD protection applications. The GGSCR demonstrates a double snapback behavior as a result of progressive trigger-on of the GGNMOS and SCR. The double snapback makes the holding voltage increase from 3.43 V to 6.25 V as compared with the conventional low-voltage SCR. The TCAD simulations are carried out to verify the modes of operation of the device.
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2058-3834
1741-4199
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subjects Devices
Electric potential
electrostatic discharge
Electrostatic discharges
ESD保护
GGNMOS
GGSCR
holding voltage
Latch-up
Metal oxide semiconductors
Metal oxides
SCR
Semiconductors
Voltage
互补金属氧化物半导体
可控硅整流器
应用
维持电压
连续触发
title An improved GGNMOS triggered SCR for high holding voltage ESD protection applications
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