Design and Fabrication of Multi-Focusing Microlens Array with Different Numerical Apertures by using Thermal Reflow Method

We present design and fabrication of a multi-focusing microlens array (MLA) using a thermal reflow method. To obtain multi-focusing properties with different numerical apertures at the elemental lens of the MLA, double-cylinder photoresist (PR) structures with different diameters were made within th...

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Veröffentlicht in:	Journal of the Optical Society of Korea 2014-02, Vol.18 (1), p.71-77
Hauptverfasser:	Park, Min-Kyu, Lee, Ho Jun, Park, Ji-Sub, Kim, Mugeon, Bae, Jeong Min, Mahmud, Imtiaz, Kim, Hak-Rin
Format:	Artikel
Sprache:	eng
Schlagworte:	Arrays Curvature Lenses Mathematical analysis Mathematical models Numerical aperture Photolithography Photoresists
Online-Zugang:	Volltext
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