Fabrication of Three-Dimensional Reflective White Pattern using Dry-Film Resist
White reflective patterns are very difficult to fabricate, due to the scattering and reflection of light, especially when the pattern size goes down to micron size. A reflective white barrier structure of height $50{\mu}m$ and width $80{\mu}m$ was fabricated using dry-film resist as an intermediate...
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Veröffentlicht in: | Journal of the Optical Society of Korea 2015-02, Vol.19 (1), p.80-83 |
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creator | Jun, Hwa Joon Kwon, Young Hoon Kwon, Jin Hyuk |
description | White reflective patterns are very difficult to fabricate, due to the scattering and reflection of light, especially when the pattern size goes down to micron size. A reflective white barrier structure of height $50{\mu}m$ and width $80{\mu}m$ was fabricated using dry-film resist as an intermediate reverse pattern. The reverse dry-film resist pattern was coated with an $SiO_2$ layer by sputtering, to protect the resist from chemical attack by the radical molecules in UV white resin. The UV white resin was applied on the dry-film resist pattern and then cured with ultraviolet light. The fine three-dimensional reflective patterns were finished by removing the dry-film resist. |
doi_str_mv | 10.3807/JOSK.2015.19.1.080 |
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A reflective white barrier structure of height $50{\mu}m$ and width $80{\mu}m$ was fabricated using dry-film resist as an intermediate reverse pattern. The reverse dry-film resist pattern was coated with an $SiO_2$ layer by sputtering, to protect the resist from chemical attack by the radical molecules in UV white resin. The UV white resin was applied on the dry-film resist pattern and then cured with ultraviolet light. The fine three-dimensional reflective patterns were finished by removing the dry-film resist.</description><identifier>ISSN: 1226-4776</identifier><identifier>EISSN: 2093-6885</identifier><identifier>DOI: 10.3807/JOSK.2015.19.1.080</identifier><language>eng</language><subject>Chemical attack ; Polymers ; Radicals ; Reflection ; Resins ; Resists ; Sputtering ; Three dimensional</subject><ispartof>Journal of the Optical Society of Korea, 2015-02, Vol.19 (1), p.80-83</ispartof><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c1900-398fd3aa2a727872e3bbf5c22d0918691e97f823ac2f634fde66157b7c02c4aa3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Jun, Hwa Joon</creatorcontrib><creatorcontrib>Kwon, Young Hoon</creatorcontrib><creatorcontrib>Kwon, Jin Hyuk</creatorcontrib><title>Fabrication of Three-Dimensional Reflective White Pattern using Dry-Film Resist</title><title>Journal of the Optical Society of Korea</title><description>White reflective patterns are very difficult to fabricate, due to the scattering and reflection of light, especially when the pattern size goes down to micron size. A reflective white barrier structure of height $50{\mu}m$ and width $80{\mu}m$ was fabricated using dry-film resist as an intermediate reverse pattern. The reverse dry-film resist pattern was coated with an $SiO_2$ layer by sputtering, to protect the resist from chemical attack by the radical molecules in UV white resin. The UV white resin was applied on the dry-film resist pattern and then cured with ultraviolet light. The fine three-dimensional reflective patterns were finished by removing the dry-film resist.</description><subject>Chemical attack</subject><subject>Polymers</subject><subject>Radicals</subject><subject>Reflection</subject><subject>Resins</subject><subject>Resists</subject><subject>Sputtering</subject><subject>Three dimensional</subject><issn>1226-4776</issn><issn>2093-6885</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2015</creationdate><recordtype>article</recordtype><recordid>eNot0MtOwzAQhWELgUQpvACrLNkkjO3ElyVqKbdKRVDE0nLcMTVKk2KnSH17UpXVSKNfZ_ERck2h4Ark7fPi_aVgQKuC6oIWoOCEjBhongulqlMyooyJvJRSnJOLlL4BBAcNI7KY2ToGZ_vQtVnns-U6IubTsME2DS_bZG_oG3R9-MXscx16zF5t32Nss10K7Vc2jft8FprN0KWQ-kty5m2T8Or_jsnH7H45eczni4enyd08d1QD5Fwrv-LWMiuZVJIhr2tfOcZWoKkSmqKWXjFuHfOCl36FQtBK1tIBc6W1fExujrvb2P3sMPVmE5LDprEtdrtkqNScsVKUYkjZMXWxSymiN9sYNjbuDQVz0DMHPXPQM1QbagY9_gc0qmKn</recordid><startdate>20150225</startdate><enddate>20150225</enddate><creator>Jun, Hwa Joon</creator><creator>Kwon, Young Hoon</creator><creator>Kwon, Jin Hyuk</creator><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20150225</creationdate><title>Fabrication of Three-Dimensional Reflective White Pattern using Dry-Film Resist</title><author>Jun, Hwa Joon ; Kwon, Young Hoon ; Kwon, Jin Hyuk</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c1900-398fd3aa2a727872e3bbf5c22d0918691e97f823ac2f634fde66157b7c02c4aa3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2015</creationdate><topic>Chemical attack</topic><topic>Polymers</topic><topic>Radicals</topic><topic>Reflection</topic><topic>Resins</topic><topic>Resists</topic><topic>Sputtering</topic><topic>Three dimensional</topic><toplevel>online_resources</toplevel><creatorcontrib>Jun, Hwa Joon</creatorcontrib><creatorcontrib>Kwon, Young Hoon</creatorcontrib><creatorcontrib>Kwon, Jin Hyuk</creatorcontrib><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of the Optical Society of Korea</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Jun, Hwa Joon</au><au>Kwon, Young Hoon</au><au>Kwon, Jin Hyuk</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Fabrication of Three-Dimensional Reflective White Pattern using Dry-Film Resist</atitle><jtitle>Journal of the Optical Society of Korea</jtitle><date>2015-02-25</date><risdate>2015</risdate><volume>19</volume><issue>1</issue><spage>80</spage><epage>83</epage><pages>80-83</pages><issn>1226-4776</issn><eissn>2093-6885</eissn><abstract>White reflective patterns are very difficult to fabricate, due to the scattering and reflection of light, especially when the pattern size goes down to micron size. A reflective white barrier structure of height $50{\mu}m$ and width $80{\mu}m$ was fabricated using dry-film resist as an intermediate reverse pattern. The reverse dry-film resist pattern was coated with an $SiO_2$ layer by sputtering, to protect the resist from chemical attack by the radical molecules in UV white resin. The UV white resin was applied on the dry-film resist pattern and then cured with ultraviolet light. The fine three-dimensional reflective patterns were finished by removing the dry-film resist.</abstract><doi>10.3807/JOSK.2015.19.1.080</doi><tpages>4</tpages><oa>free_for_read</oa></addata></record> |
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source | Optica Publishing Group Journals |
subjects | Chemical attack Polymers Radicals Reflection Resins Resists Sputtering Three dimensional |
title | Fabrication of Three-Dimensional Reflective White Pattern using Dry-Film Resist |
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