Fabrication of Three-Dimensional Reflective White Pattern using Dry-Film Resist

White reflective patterns are very difficult to fabricate, due to the scattering and reflection of light, especially when the pattern size goes down to micron size. A reflective white barrier structure of height $50{\mu}m$ and width $80{\mu}m$ was fabricated using dry-film resist as an intermediate...

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Veröffentlicht in:Journal of the Optical Society of Korea 2015-02, Vol.19 (1), p.80-83
Hauptverfasser: Jun, Hwa Joon, Kwon, Young Hoon, Kwon, Jin Hyuk
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container_title Journal of the Optical Society of Korea
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creator Jun, Hwa Joon
Kwon, Young Hoon
Kwon, Jin Hyuk
description White reflective patterns are very difficult to fabricate, due to the scattering and reflection of light, especially when the pattern size goes down to micron size. A reflective white barrier structure of height $50{\mu}m$ and width $80{\mu}m$ was fabricated using dry-film resist as an intermediate reverse pattern. The reverse dry-film resist pattern was coated with an $SiO_2$ layer by sputtering, to protect the resist from chemical attack by the radical molecules in UV white resin. The UV white resin was applied on the dry-film resist pattern and then cured with ultraviolet light. The fine three-dimensional reflective patterns were finished by removing the dry-film resist.
doi_str_mv 10.3807/JOSK.2015.19.1.080
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source Optica Publishing Group Journals
subjects Chemical attack
Polymers
Radicals
Reflection
Resins
Resists
Sputtering
Three dimensional
title Fabrication of Three-Dimensional Reflective White Pattern using Dry-Film Resist
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