Combinatorial HV-CVD survey of barium triisopropyl cyclopentadienyl and titanium tetraisopropoxide for the deposition of BaTiO sub(3)

Barium titanate is a very promising material for the integration of optical communication into electronic integrated circuits. For a successful integration into CMOS compatible technology, a growth process has to be found which allows forming crystalline BaTiO sub(3) at sufficiently low temperatures...

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Veröffentlicht in:	Physica status solidi. A, Applications and materials science Applications and materials science, 2015-07, Vol.212 (7), p.1556-1562
Hauptverfasser:	Reinke, Michael, Kuzminykh, Yury, Hoffmann, Patrik
Format:	Artikel
Sprache:	eng
Schlagworte:	Barium titanates Chemical vapor deposition Combinatorial analysis Crystal structure Deposition Formations Precursors Titanium
Online-Zugang:	Volltext
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