Mechanical properties of SiLi sub(x) thin films at different stages of electrochemical Li insertion

The mechanical properties of amorphous Si thin films, lithiated electrochemically to different Si--Li compositions are studied by ex situ nanoindentation. The compositions of the films are adjusted using an electrochemical routine that corrects for the Li consumed by SEI layer growth during initial lithiation. The mechanical properties such as Young's modulus and hardness are derived from nanoindentation. For compositions between Si and SiLi sub(2.5) the Young's modulus decreases with increasing Li content from 160GPa to 8GPa and the hardness decreases from 14GPa to 0.1GPa. The yield strength values, as deduced from hardness measurements, decrease from 5GPa to 0.05GPa. AFM imaging is used on the electrochemically cycled films to assess the SEIs impact on the nanomechanical measurements. XPS depth-profiling of the electrochemically cycled sample indicated a Li concentration gradient across the film thickness.