The influence of substrate bias voltages on structure, mechanical properties and anti-corrosion performance of Cr doped diamond-like carbon films deposited by steered cathodic arc evaporation

Cr-doped diamond-like carbon films (Cr-DLC) were deposited on 304 stainless steel (304SS) substrates by a steered cathodic arc plasma evaporation with various negative bias voltages (−50 to −550V). The Cr layer (~90nm), CrN layer (~400nm), transition layer and Cr-DLC layer (~3.2μm.) were deposited s...

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Veröffentlicht in:	Thin solid films 2015-12, Vol.597, p.88-96
Hauptverfasser:	Liang, Chih-Hao, Huang, Cheng-Feng, Tsai, Heng-Yi
Format:	Artikel
Sprache:	eng
Schlagworte:	Anti-corrosion performance Austenitic stainless steels Bias Chromium Corrosion prevention Deposition Diamond-like carbon film Droplets Electric potential Hardness Mechanical properties Steered cathodic arc plasma evaporation Structural properties Voltage
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