Three-dimensional structured on-chip stacked zone plates for nanoscale X-ray imaging with high efficiency

Fresnel zone plates are the key optical elements for nanoscale focusing of X-ray beams with high spatial resolution. Conventional zone plates manufactured by planar nanotechnology processes are limited by the achievable aspect ratios of their zone structures. Additionally, ultra-high resolution X-ra...

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Veröffentlicht in:Nano research 2014-04, Vol.7 (4), p.528-535
Hauptverfasser: Werner, Stephan, Rehbein, Stefan, Guttmann, Peter, Schneider, Gerd
Format: Artikel
Sprache:eng
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