Control Strategy Research on Avoid and Escape the Singular Area of the 3PRR Parallel Platform Based on SEM Environment

Micro-nano operating system is an important part in the field of precision operation and machining. The sample stage of the micro-nano operating system is used to place and move samples at large-scale stroke; therefore the sample stage needs to possess the features of large stroke and high precision...

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Veröffentlicht in:Ji xie gong cheng xue bao 2015-12, Vol.51 (23), p.1-11
1. Verfasser: MO, Jiasi
Format: Artikel
Sprache:chi ; eng
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