The Anodized Film's Characteristic Analysis of Before and After Sealing Treatment

Porous anodized processing film is used for the vacuum equipment's aluminum alloy such as in the chemical vapor deposition system and a etching system as a corrosion resistance surface treatment. This sealing treatment is often performed after anodized processing because the porous anodized pro...

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Veröffentlicht in:	Journal of the Vacuum Society of Japan 2015, Vol.58(12), pp.437-441
Hauptverfasser:	ISHIGURE, Fumiaki, INAYOSHI, Sakae
Format:	Artikel
Sprache:	eng ; jpn
Schlagworte:	Anodizing Corrosion resistance Deposition Etching Scanning electron microscopy Sealing X-ray photoelectron spectroscopy X-rays
Online-Zugang:	Volltext
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