Direct Imprinting of Liquid Silicon

A polymeric precursor solution for semiconducting silicon called “liquid silicon” was synthesized and directly imprinted to form well-defined and fine amorphous silicon patterns. The spin-coated film was cured and imprinted followed by annealing at 380 °C to complete the polymer-to-silicon conversio...

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Veröffentlicht in:	ACS applied materials & interfaces 2016-04, Vol.8 (15), p.9969-9976
Hauptverfasser:	Masuda, Takashi, Takagishi, Hideyuki, Yamazaki, Ken, Shimoda, Tatsuya
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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