Investigations of the composition of macro-, micro- and nanoporous silicon surface by ultrasoft X-ray spectroscopy and X-ray photoelectron spectroscopy
•Nano, meso and macroporous silicon layers were obtained.•Electron structure and phase composition of the surface layers in porous silicon were investigated starting from the surface and into the bulk.•Analysis of the X-ray emission spectra applying the simulation method allowed to follow the trends...
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| Veröffentlicht in: | Applied surface science 2015-12, Vol.359, p.550-559 |
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| creator | Lenshin, A.S. Kashkarov, V.M. Domashevskaya, E.P. Bel’tyukov, A.N. Gil’mutdinov, F.Z. |
| description | •Nano, meso and macroporous silicon layers were obtained.•Electron structure and phase composition of the surface layers in porous silicon were investigated starting from the surface and into the bulk.•Analysis of the X-ray emission spectra applying the simulation method allowed to follow the trends in the changes of the composition between the samples of porous silicon with different pores size.
The features of atomic and electron structure and phase composition of the surface in the samples of macro-, micro- and nanoporous silicon and their changes with depth were investigated with the use of X-ray photoelectron spectroscopy, ultrasoft X-ray emission spectroscopy and scanning electron microscopy. Analysis of the X-ray emission spectra applying the simulation method allowed to follow the trends in the changes of the composition for the investigated samples starting from the surface and into the bulk and to show the differences in the phase composition between the samples of porous silicon with different pores size. |
| doi_str_mv | 10.1016/j.apsusc.2015.10.140 |
| format | Article |
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The features of atomic and electron structure and phase composition of the surface in the samples of macro-, micro- and nanoporous silicon and their changes with depth were investigated with the use of X-ray photoelectron spectroscopy, ultrasoft X-ray emission spectroscopy and scanning electron microscopy. Analysis of the X-ray emission spectra applying the simulation method allowed to follow the trends in the changes of the composition for the investigated samples starting from the surface and into the bulk and to show the differences in the phase composition between the samples of porous silicon with different pores size.</description><identifier>ISSN: 0169-4332</identifier><identifier>DOI: 10.1016/j.apsusc.2015.10.140</identifier><language>eng</language><publisher>Elsevier B.V</publisher><subject>Atomic beam spectroscopy ; Electron spectroscopy ; Electronic structure ; Nanostructure ; Oxidation ; Phase composition ; Photoelectron spectroscopy ; Porous silicon ; Silicon ; X-rays</subject><ispartof>Applied surface science, 2015-12, Vol.359, p.550-559</ispartof><rights>2015 Elsevier B.V.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c269t-23d855e1f1c52c3e5856a11c92eab6835c37807f2c78b8bf46992885c6de5dc83</citedby><cites>FETCH-LOGICAL-c269t-23d855e1f1c52c3e5856a11c92eab6835c37807f2c78b8bf46992885c6de5dc83</cites><orcidid>0000-0002-1939-253X</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.apsusc.2015.10.140$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>315,781,785,3551,27929,27930,46000</link.rule.ids></links><search><creatorcontrib>Lenshin, A.S.</creatorcontrib><creatorcontrib>Kashkarov, V.M.</creatorcontrib><creatorcontrib>Domashevskaya, E.P.</creatorcontrib><creatorcontrib>Bel’tyukov, A.N.</creatorcontrib><creatorcontrib>Gil’mutdinov, F.Z.</creatorcontrib><title>Investigations of the composition of macro-, micro- and nanoporous silicon surface by ultrasoft X-ray spectroscopy and X-ray photoelectron spectroscopy</title><title>Applied surface science</title><description>•Nano, meso and macroporous silicon layers were obtained.•Electron structure and phase composition of the surface layers in porous silicon were investigated starting from the surface and into the bulk.•Analysis of the X-ray emission spectra applying the simulation method allowed to follow the trends in the changes of the composition between the samples of porous silicon with different pores size.
The features of atomic and electron structure and phase composition of the surface in the samples of macro-, micro- and nanoporous silicon and their changes with depth were investigated with the use of X-ray photoelectron spectroscopy, ultrasoft X-ray emission spectroscopy and scanning electron microscopy. Analysis of the X-ray emission spectra applying the simulation method allowed to follow the trends in the changes of the composition for the investigated samples starting from the surface and into the bulk and to show the differences in the phase composition between the samples of porous silicon with different pores size.</description><subject>Atomic beam spectroscopy</subject><subject>Electron spectroscopy</subject><subject>Electronic structure</subject><subject>Nanostructure</subject><subject>Oxidation</subject><subject>Phase composition</subject><subject>Photoelectron spectroscopy</subject><subject>Porous silicon</subject><subject>Silicon</subject><subject>X-rays</subject><issn>0169-4332</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2015</creationdate><recordtype>article</recordtype><recordid>eNp9kL1u3DAQhFUkQM523iAFSxfWmT-iRDUGDCOxDRhIkwDpCN5qleNBEmWuZEBPktcNdUqTxtUCszMDzJdlXwTfCy7K29PejTQT7CUXer-qBf-Q7dKrzgul5KfsgujEuZCmUrvsz_PwhjT5327yYSAWWjYdkUHox0B-1VapdxBDfsN6v17mhoYNbghjiGEmRr7zkIw0x9YBssPC5m6KjkI7sV95dAujEWGKgSCMyzm-yeMxTAG782_4z3SVfWxdR_j5373Mfn77-uPhKX_5_vj8cP-SgyzrKZeqMVqjaAVoCQq10aUTAmqJ7lAapUFVhlethMoczKEtyrqWxmgoG9QNGHWZXW-9YwyvcyJhe0-AXecGTNusqFJeyUrXyVps1sSAKGJrx-h7FxcruF3Z25Pd2NuV_VkteIrdbTFMM948RkvgcQBsfEx7bRP8-wV_Adx5lUw</recordid><startdate>20151230</startdate><enddate>20151230</enddate><creator>Lenshin, A.S.</creator><creator>Kashkarov, V.M.</creator><creator>Domashevskaya, E.P.</creator><creator>Bel’tyukov, A.N.</creator><creator>Gil’mutdinov, F.Z.</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0002-1939-253X</orcidid></search><sort><creationdate>20151230</creationdate><title>Investigations of the composition of macro-, micro- and nanoporous silicon surface by ultrasoft X-ray spectroscopy and X-ray photoelectron spectroscopy</title><author>Lenshin, A.S. ; Kashkarov, V.M. ; Domashevskaya, E.P. ; Bel’tyukov, A.N. ; Gil’mutdinov, F.Z.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c269t-23d855e1f1c52c3e5856a11c92eab6835c37807f2c78b8bf46992885c6de5dc83</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2015</creationdate><topic>Atomic beam spectroscopy</topic><topic>Electron spectroscopy</topic><topic>Electronic structure</topic><topic>Nanostructure</topic><topic>Oxidation</topic><topic>Phase composition</topic><topic>Photoelectron spectroscopy</topic><topic>Porous silicon</topic><topic>Silicon</topic><topic>X-rays</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Lenshin, A.S.</creatorcontrib><creatorcontrib>Kashkarov, V.M.</creatorcontrib><creatorcontrib>Domashevskaya, E.P.</creatorcontrib><creatorcontrib>Bel’tyukov, A.N.</creatorcontrib><creatorcontrib>Gil’mutdinov, F.Z.</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Applied surface science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Lenshin, A.S.</au><au>Kashkarov, V.M.</au><au>Domashevskaya, E.P.</au><au>Bel’tyukov, A.N.</au><au>Gil’mutdinov, F.Z.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Investigations of the composition of macro-, micro- and nanoporous silicon surface by ultrasoft X-ray spectroscopy and X-ray photoelectron spectroscopy</atitle><jtitle>Applied surface science</jtitle><date>2015-12-30</date><risdate>2015</risdate><volume>359</volume><spage>550</spage><epage>559</epage><pages>550-559</pages><issn>0169-4332</issn><abstract>•Nano, meso and macroporous silicon layers were obtained.•Electron structure and phase composition of the surface layers in porous silicon were investigated starting from the surface and into the bulk.•Analysis of the X-ray emission spectra applying the simulation method allowed to follow the trends in the changes of the composition between the samples of porous silicon with different pores size.
The features of atomic and electron structure and phase composition of the surface in the samples of macro-, micro- and nanoporous silicon and their changes with depth were investigated with the use of X-ray photoelectron spectroscopy, ultrasoft X-ray emission spectroscopy and scanning electron microscopy. Analysis of the X-ray emission spectra applying the simulation method allowed to follow the trends in the changes of the composition for the investigated samples starting from the surface and into the bulk and to show the differences in the phase composition between the samples of porous silicon with different pores size.</abstract><pub>Elsevier B.V</pub><doi>10.1016/j.apsusc.2015.10.140</doi><tpages>10</tpages><orcidid>https://orcid.org/0000-0002-1939-253X</orcidid></addata></record> |
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| ispartof | Applied surface science, 2015-12, Vol.359, p.550-559 |
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| language | eng |
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| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Atomic beam spectroscopy Electron spectroscopy Electronic structure Nanostructure Oxidation Phase composition Photoelectron spectroscopy Porous silicon Silicon X-rays |
| title | Investigations of the composition of macro-, micro- and nanoporous silicon surface by ultrasoft X-ray spectroscopy and X-ray photoelectron spectroscopy |
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