Mechanical and tribological properties of CrN/TiN superlattice coatings deposited by a combination of arc-free deep oscillation magnetron sputtering with pulsed dc magnetron sputtering

Deep oscillation magnetron sputtering (DOMS) is an alternative high-power pulsed magnetron sputtering technique, which offers virtually arc-free depositions especially for reactive depositions of some insulating coatings under optimized pulsing conditions. CrN/TiN superlattice coatings with a modula...

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Veröffentlicht in:	Thin solid films 2015-11, Vol.594, p.147-155
Hauptverfasser:	Ou, Y.X., Lin, J., Che, H.L., Moore, J.J., Sproul, W.D., Lei, M.K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chromium Coatings CrN/TiN superlattice coatings Deep oscillation magnetron sputtering Deposition Friction Magnetron sputtering Mechanical properties Pulsed direct-current magnetron sputtering Superlattices Texture Titanium nitride Tribological properties
Online-Zugang:	Volltext
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