Fabrication of yttrium-doped barium zirconate thin films with sub-micrometer thickness by a sol–gel spin coating method

A modified sol–gel process was developed for the fabrication of sub-micrometer scale yttrium-doped barium zirconate (BZY) thin film at much lower processing temperatures. The film was fabricated by direct spin-coating of the sol on a Si3N4 passivated Si substrate, followed by low temperature thermal annealing at 1000°C, and single BZY phase without barium carbonate residue was obtained. A 200nm-thick thin film without obvious through-film cracks was fabricated with optimized process parameters of sol concentration and heating rate. The stoichiometry of the BZY thin film was well-controlled and no Ba evaporation was observed due to the low processing temperature. The combination of sol–gel and spin coating method can be a promising alternative to vacuum-based thin film deposition techniques for the fabrication of sub-micrometer scale BZY thin film. •A sol–gel spin coating method was developed for the fabrication of BZY thin films.•The processing temperature was much lower compared to powder-based sintering.•Sub-micrometer scale BZY thin film with well-controlled stoichiometry was obtained.