Palladium/silicon nanowire Schottky barrier-based hydrogen sensors

This work presents the design, fabrication, and characterization of a hydrogen sensor based on a palladium/nanowire Schottky barrier field-effect transistor that operates at room temperature. The fabricated sensor consists of boron-doped silicon nanowire arrays that are contact printed on top of a S...

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Veröffentlicht in:	Sensors and actuators. B, Chemical Chemical, 2010-03, Vol.145 (1), p.232-238
Hauptverfasser:	Skucha, Karl, Fan, Zhiyong, Jeon, Kanghoon, Javey, Ali, Boser, Bernhard
Format:	Artikel
Sprache:	eng
Schlagworte:	Contact Drift Gas sensor H 2 sensor Hydrogen detection Hydrogen sensor Nanocomposites Nanomaterials Nanostructure Nanowire Nanowires Palladium Schottky barrier Sensors Silicon substrates
Online-Zugang:	Volltext
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