In-situ monitoring of CuInSe2 thin films growth by light scattering

Light scattering spectroscopy, mainly developed for Cu(In,Ga)Se2 thin films growth, has been demonstrated to be an efficient in-situ monitoring tool. It consists of illuminating the substrate surface using a light source and collecting the diffused light with a spectrometer. The on-line information...

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Veröffentlicht in:	Thin solid films 2015-05, Vol.582, p.276-278
Hauptverfasser:	Robin, Yoann, Moret, Matthieu, Ruffenach, Sandra, Aulombard, Roger-Louis, Briot, Olivier
Format:	Artikel
Sprache:	eng
Schlagworte:	Coevaporation Condensed Matter COPPER INDIUM SELENIDE COPPER SELENIDE Glass GLASSES Light scattering Light scattering spectroscopy MACHINE TOOLS Materials Science Molybdenum Monitoring Physics SCATTERING Spectrometers Spectroscopy THIN FILMS Three-stage process Vacuum
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