A study of chemical products formed on sapphire (0001) during chemical–mechanical polishing

A study of chemical products formed on sapphire (0001) during chemical–mechanical polishing is presented. The results demonstrated that the formation and removal of chemical products both proceeded from the hexagonal close-packed sapphire Al-O layers described as atomic terraces, and the material re...

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Veröffentlicht in:	Surface & coatings technology 2015-05, Vol.270, p.206-220
Hauptverfasser:	Shi, Xiaolei, Pan, Guoshun, Zhou, Yan, Xu, Li, Zou, Chunli, Gong, Hua
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Chemical products Chemical-mechanical polishing Crystals Distortion Material removal mechanism Polished Polishing Sapphire Sapphire substrate Step-terrace structure Terraces
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