All-water-based electron-beam lithography using silk as a resist

Traditional nanofabrication techniques often require complex lithographic steps and the use of toxic chemicals. To move from the laboratory scale to large scales, nanofabrication should be carried out using alternative procedures that are simple, inexpensive and use non-toxic solvents. Recent effort...

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Veröffentlicht in:Nature nanotechnology 2014-04, Vol.9 (4), p.306-310
Hauptverfasser: Kim, Sunghwan, Marelli, Benedetto, Brenckle, Mark A., Mitropoulos, Alexander N., Gil, Eun-Seok, Tsioris, Konstantinos, Tao, Hu, Kaplan, David L., Omenetto, Fiorenzo G.
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