ZnO based SAW and FBAR devices for bio-sensing applications

•Smooth, low stress films of ZnO have been produced using a novel Sputtering system.•ZnO acoustic devices have been used to move, mix, pump, eject and atomise liquids.•Such surface acoustic wave devices have been shown to act as effective biosensors.•Film Bulk Acoustic Resonator (FBARs) biosensors c...

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Veröffentlicht in:	Journal of non-Newtonian fluid mechanics 2015-08, Vol.222, p.209-216
Hauptverfasser:	Flewitt, A.J., Luo, J.K., Fu, Y.Q., Garcia-Gancedo, L., Du, X.Y., Lu, J.R., Zhao, X.B., Iborra, E., Ramos, M., Milne, W.I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustics Bio sensors Devices FBARs Fluid dynamics Fluid flow Fluids Sputtering Surface acoustic waves Zinc oxide
Online-Zugang:	Volltext
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