$At-wavelength metrology using the X-ray speckle tracking technique: case study of a X-ray compound refractive lens$

At-wavelength metrology using the X-ray speckle tracking technique: case study of a X-ray compound refractive lens

The X-ray speckle tracking technique has been established on the Test beamline B16 at Diamond and is being used as a valuable tool for at-wavelength metrology. We show here the possibilities and the achievable performances of the X-ray Speckle Tracking technique for optics characterization: the desc...

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Veröffentlicht in:	Journal of physics. Conference series 2013-01, Vol.425 (5), p.52020-4
Hauptverfasser:	Berujon, S, Wang, H, Sawhney, K J S
Format:	Artikel
Sprache:	eng
Schlagworte:	Case studies Diamond tools Diffraction gratings Interferometers Lenses Metrology Micrometers Physics Refractive lenses Spatial resolution Tracking X-rays
Online-Zugang:	Volltext
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