Development of at-wavelength metrology using grating-based shearing interferometry at Diamond Light Source
The grating-based shearing interferometer has been established and further developed on B16 at Diamond Light Source. The beamline performances of both an X-ray plane mirror and a compound refractive lens (CRL) have been investigated using this technique. The slope error of the X-ray mirror was retri...
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| Veröffentlicht in: | Journal of physics. Conference series 2013-01, Vol.425 (5), p.52021-4 |
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| container_title | Journal of physics. Conference series |
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| creator | Wang, Hongchang Berujon, Sebastien Sawhney, Kawal |
| description | The grating-based shearing interferometer has been established and further developed on B16 at Diamond Light Source. The beamline performances of both an X-ray plane mirror and a compound refractive lens (CRL) have been investigated using this technique. The slope error of the X-ray mirror was retrieved from the wavefront phase gradient, which was measured using two different processing schemes: phase stepping and moiré fringe analysis. The interferometer has demonstrated a high sensitivity with sub-microradian accuracy. Some of the advantages, disadvantages and limitations for the two approaches will also be presented. |
| doi_str_mv | 10.1088/1742-6596/425/5/052021 |
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| fullrecord | <record><control><sourceid>proquest_hal_p</sourceid><recordid>TN_cdi_proquest_miscellaneous_1762103044</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1762103044</sourcerecordid><originalsourceid>FETCH-LOGICAL-c398t-9c539246a3fa2747165d84d23f9a5f9260d692663b3ac90643e8d23700f58f4a3</originalsourceid><addsrcrecordid>eNpdkV1LwzAUhosoOKd_QQLe6EVdvpNejs0vGHihXoesTbqOtplJOtm_N2WyC3ORE97zcMjhybJbBB8RlHKGBMU5ZwWfUcxmbAYZhhidZZNT4_z0lvIyuwphCyFJR0yy7dLsTet2nekjcBbomP_olJi-jhvQmehd6-oDGELT16D2Oqaar3UwFQgbo_0YN3003hrvRv6QZoBlozvXV2DV1JsIPtzgS3OdXVjdBnPzV6fZ1_PT5-I1X72_vC3mq7wkhYx5UTJSYMo1sRoLKhBnlaQVJrbQzBaYw4qnm5M10WUBOSVGpq6A0DJpqSbT7OE4d6NbtfNNp_1BOd2o1_lKjRlETGAJiz1K7P2R3Xn3PZgQVdeE0rSt7o0bgkKCYwQJpDShd__QbVqrT5sozIQgFCNEEsWPVOldCN7Y0w8QVKMuNZpQoxWVdCmmjrrIL_v4hz4</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2577342113</pqid></control><display><type>article</type><title>Development of at-wavelength metrology using grating-based shearing interferometry at Diamond Light Source</title><source>IOP Publishing Free Content</source><source>Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals</source><source>IOPscience extra</source><source>Alma/SFX Local Collection</source><source>Free Full-Text Journals in Chemistry</source><creator>Wang, Hongchang ; Berujon, Sebastien ; Sawhney, Kawal</creator><creatorcontrib>Wang, Hongchang ; Berujon, Sebastien ; Sawhney, Kawal</creatorcontrib><description>The grating-based shearing interferometer has been established and further developed on B16 at Diamond Light Source. The beamline performances of both an X-ray plane mirror and a compound refractive lens (CRL) have been investigated using this technique. The slope error of the X-ray mirror was retrieved from the wavefront phase gradient, which was measured using two different processing schemes: phase stepping and moiré fringe analysis. The interferometer has demonstrated a high sensitivity with sub-microradian accuracy. Some of the advantages, disadvantages and limitations for the two approaches will also be presented.</description><identifier>ISSN: 1742-6588</identifier><identifier>EISSN: 1742-6596</identifier><identifier>DOI: 10.1088/1742-6596/425/5/052021</identifier><language>eng</language><publisher>Bristol: IOP Publishing</publisher><subject>Diamonds ; Error analysis ; Fringe analysis ; Interferometers ; Light sources ; Metrology ; Moire fringes ; Phase stepping ; Physics ; Refractive lenses ; Shearing ; Wave fronts ; X ray mirrors</subject><ispartof>Journal of physics. Conference series, 2013-01, Vol.425 (5), p.52021-4</ispartof><rights>Copyright IOP Publishing Mar 2013</rights><rights>Distributed under a Creative Commons Attribution 4.0 International License</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c398t-9c539246a3fa2747165d84d23f9a5f9260d692663b3ac90643e8d23700f58f4a3</citedby><cites>FETCH-LOGICAL-c398t-9c539246a3fa2747165d84d23f9a5f9260d692663b3ac90643e8d23700f58f4a3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,309,314,776,780,881,27901,27902</link.rule.ids><backlink>$$Uhttps://hal.science/hal-01572809$$DView record in HAL$$Hfree_for_read</backlink></links><search><creatorcontrib>Wang, Hongchang</creatorcontrib><creatorcontrib>Berujon, Sebastien</creatorcontrib><creatorcontrib>Sawhney, Kawal</creatorcontrib><title>Development of at-wavelength metrology using grating-based shearing interferometry at Diamond Light Source</title><title>Journal of physics. Conference series</title><description>The grating-based shearing interferometer has been established and further developed on B16 at Diamond Light Source. The beamline performances of both an X-ray plane mirror and a compound refractive lens (CRL) have been investigated using this technique. The slope error of the X-ray mirror was retrieved from the wavefront phase gradient, which was measured using two different processing schemes: phase stepping and moiré fringe analysis. The interferometer has demonstrated a high sensitivity with sub-microradian accuracy. Some of the advantages, disadvantages and limitations for the two approaches will also be presented.</description><subject>Diamonds</subject><subject>Error analysis</subject><subject>Fringe analysis</subject><subject>Interferometers</subject><subject>Light sources</subject><subject>Metrology</subject><subject>Moire fringes</subject><subject>Phase stepping</subject><subject>Physics</subject><subject>Refractive lenses</subject><subject>Shearing</subject><subject>Wave fronts</subject><subject>X ray mirrors</subject><issn>1742-6588</issn><issn>1742-6596</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><sourceid>BENPR</sourceid><recordid>eNpdkV1LwzAUhosoOKd_QQLe6EVdvpNejs0vGHihXoesTbqOtplJOtm_N2WyC3ORE97zcMjhybJbBB8RlHKGBMU5ZwWfUcxmbAYZhhidZZNT4_z0lvIyuwphCyFJR0yy7dLsTet2nekjcBbomP_olJi-jhvQmehd6-oDGELT16D2Oqaar3UwFQgbo_0YN3003hrvRv6QZoBlozvXV2DV1JsIPtzgS3OdXVjdBnPzV6fZ1_PT5-I1X72_vC3mq7wkhYx5UTJSYMo1sRoLKhBnlaQVJrbQzBaYw4qnm5M10WUBOSVGpq6A0DJpqSbT7OE4d6NbtfNNp_1BOd2o1_lKjRlETGAJiz1K7P2R3Xn3PZgQVdeE0rSt7o0bgkKCYwQJpDShd__QbVqrT5sozIQgFCNEEsWPVOldCN7Y0w8QVKMuNZpQoxWVdCmmjrrIL_v4hz4</recordid><startdate>20130101</startdate><enddate>20130101</enddate><creator>Wang, Hongchang</creator><creator>Berujon, Sebastien</creator><creator>Sawhney, Kawal</creator><general>IOP Publishing</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>ARAPS</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>DWQXO</scope><scope>H8D</scope><scope>HCIFZ</scope><scope>L7M</scope><scope>P5Z</scope><scope>P62</scope><scope>PIMPY</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>7U5</scope><scope>8BQ</scope><scope>JG9</scope><scope>1XC</scope><scope>VOOES</scope></search><sort><creationdate>20130101</creationdate><title>Development of at-wavelength metrology using grating-based shearing interferometry at Diamond Light Source</title><author>Wang, Hongchang ; Berujon, Sebastien ; Sawhney, Kawal</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c398t-9c539246a3fa2747165d84d23f9a5f9260d692663b3ac90643e8d23700f58f4a3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Diamonds</topic><topic>Error analysis</topic><topic>Fringe analysis</topic><topic>Interferometers</topic><topic>Light sources</topic><topic>Metrology</topic><topic>Moire fringes</topic><topic>Phase stepping</topic><topic>Physics</topic><topic>Refractive lenses</topic><topic>Shearing</topic><topic>Wave fronts</topic><topic>X ray mirrors</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Wang, Hongchang</creatorcontrib><creatorcontrib>Berujon, Sebastien</creatorcontrib><creatorcontrib>Sawhney, Kawal</creatorcontrib><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>Advanced Technologies & Aerospace Collection</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Central Korea</collection><collection>Aerospace Database</collection><collection>SciTech Premium Collection</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Advanced Technologies & Aerospace Database</collection><collection>ProQuest Advanced Technologies & Aerospace Collection</collection><collection>Publicly Available Content Database</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Materials Research Database</collection><collection>Hyper Article en Ligne (HAL)</collection><collection>Hyper Article en Ligne (HAL) (Open Access)</collection><jtitle>Journal of physics. Conference series</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Wang, Hongchang</au><au>Berujon, Sebastien</au><au>Sawhney, Kawal</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Development of at-wavelength metrology using grating-based shearing interferometry at Diamond Light Source</atitle><jtitle>Journal of physics. Conference series</jtitle><date>2013-01-01</date><risdate>2013</risdate><volume>425</volume><issue>5</issue><spage>52021</spage><epage>4</epage><pages>52021-4</pages><issn>1742-6588</issn><eissn>1742-6596</eissn><abstract>The grating-based shearing interferometer has been established and further developed on B16 at Diamond Light Source. The beamline performances of both an X-ray plane mirror and a compound refractive lens (CRL) have been investigated using this technique. The slope error of the X-ray mirror was retrieved from the wavefront phase gradient, which was measured using two different processing schemes: phase stepping and moiré fringe analysis. The interferometer has demonstrated a high sensitivity with sub-microradian accuracy. Some of the advantages, disadvantages and limitations for the two approaches will also be presented.</abstract><cop>Bristol</cop><pub>IOP Publishing</pub><doi>10.1088/1742-6596/425/5/052021</doi><tpages>4</tpages><oa>free_for_read</oa></addata></record> |
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| subjects | Diamonds Error analysis Fringe analysis Interferometers Light sources Metrology Moire fringes Phase stepping Physics Refractive lenses Shearing Wave fronts X ray mirrors |
| title | Development of at-wavelength metrology using grating-based shearing interferometry at Diamond Light Source |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-13T01%3A49%3A24IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_hal_p&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Development%20of%20at-wavelength%20metrology%20using%20grating-based%20shearing%20interferometry%20at%20Diamond%20Light%20Source&rft.jtitle=Journal%20of%20physics.%20Conference%20series&rft.au=Wang,%20Hongchang&rft.date=2013-01-01&rft.volume=425&rft.issue=5&rft.spage=52021&rft.epage=4&rft.pages=52021-4&rft.issn=1742-6588&rft.eissn=1742-6596&rft_id=info:doi/10.1088/1742-6596/425/5/052021&rft_dat=%3Cproquest_hal_p%3E1762103044%3C/proquest_hal_p%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2577342113&rft_id=info:pmid/&rfr_iscdi=true |