Synthesis of ZrSiN composite films using a plasma focus device
ZrSiN thin films are synthesized by using plasma focus through various numbers of focus shots （10, 20, and 30）, with samples placed at 9 cm away from the tip of the anode. Crystal structures, surface morphologies, and elemental compositions of ZrSiN films are characterized by an X-ray diffractometer...
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| Veröffentlicht in: | Chinese physics B 2014-06, Vol.23 (6), p.381-386 |
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| container_title | Chinese physics B |
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| creator | Ahmad, R. Hussain, T. Khan, I. A. Rawat, R. S. |
| description | ZrSiN thin films are synthesized by using plasma focus through various numbers of focus shots （10, 20, and 30）, with samples placed at 9 cm away from the tip of the anode. Crystal structures, surface morphologies, and elemental compositions of ZrSiN films are characterized by an X-ray diffractometer （XRD） and scanning electron microscope （SEM） attached with energy dispersive X-ray spectroscopy （EDS）. XRD patterns confirm the formations of polycrystalline ZrSiN films. Crystallinity of nitride increases with the increase of focus shot number. The average crystallite size of zirconium nitride increases from 27 ± 3 nm to 73±8 nm and microstrain decreases from 2.28 to 1.0 with the increase of the focus shot number. SEM results exhibit the formations of granular and oval-shaped microstructures, depending on the number of focus shots. EDS results confirm the presences of silicon, zirconium, nitrogen, and oxygen in the composite films. The content values of Zr and N in the composite films increase with the increase of the focus shot number. |
| doi_str_mv | 10.1088/1674-1056/23/6/065204 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_1762069233</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><cqvip_id>49805469</cqvip_id><sourcerecordid>1762069233</sourcerecordid><originalsourceid>FETCH-LOGICAL-c312t-b18d17ca8f50f41652100008ad96a53506c5a8d2bfdd3e060a0379ec9ced23463</originalsourceid><addsrcrecordid>eNo9kD1PwzAQhi0EEqHwE5DMxhJytmPHWZBQxZdUwVBYWCzXsVujJE7jBKn_nlStesst7_Pq7kHolsADASkzIoo8JcBFRlkmMhCcQn6GEgpcpkyy_Bwlp8wluorxF0AQoCxBj8tdO2xs9BEHh3_6pf_AJjRdiH6w2Pm6iXiMvl1jjbtax0ZjF8wYcWX_vLHX6MLpOtqb456h75fnr_lbuvh8fZ8_LVLDCB3SFZEVKYyWjoPLyXQggWmkrkqhOeMgDNeyoitXVcyCAA2sKK0pja0oywWboftDb9eH7WjjoBofja1r3dowRkUKQUGUlLEpyg9R04cYe-tU1_tG9ztFQO19qb0LtXehKFNCHXxN3N2R24R2vZ1ePoF5KYHnomT_59Jn5Q</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1762069233</pqid></control><display><type>article</type><title>Synthesis of ZrSiN composite films using a plasma focus device</title><source>IOP Publishing Journals</source><creator>Ahmad, R. ; Hussain, T. ; Khan, I. A. ; Rawat, R. S.</creator><creatorcontrib>Ahmad, R. ; Hussain, T. ; Khan, I. A. ; Rawat, R. S.</creatorcontrib><description>ZrSiN thin films are synthesized by using plasma focus through various numbers of focus shots （10, 20, and 30）, with samples placed at 9 cm away from the tip of the anode. Crystal structures, surface morphologies, and elemental compositions of ZrSiN films are characterized by an X-ray diffractometer （XRD） and scanning electron microscope （SEM） attached with energy dispersive X-ray spectroscopy （EDS）. XRD patterns confirm the formations of polycrystalline ZrSiN films. Crystallinity of nitride increases with the increase of focus shot number. The average crystallite size of zirconium nitride increases from 27 ± 3 nm to 73±8 nm and microstrain decreases from 2.28 to 1.0 with the increase of the focus shot number. SEM results exhibit the formations of granular and oval-shaped microstructures, depending on the number of focus shots. EDS results confirm the presences of silicon, zirconium, nitrogen, and oxygen in the composite films. The content values of Zr and N in the composite films increase with the increase of the focus shot number.</description><identifier>ISSN: 1674-1056</identifier><identifier>EISSN: 2058-3834</identifier><identifier>EISSN: 1741-4199</identifier><identifier>DOI: 10.1088/1674-1056/23/6/065204</identifier><language>eng</language><subject>Crystallites ; Devices ; Formations ; Plasma focus ; Scanning electron microscopy ; Shot ; SiN薄膜 ; X-ray diffraction ; XRD图谱 ; Zirconium ; 合成 ; 复合薄膜 ; 扫描电子显微镜 ; 等离子体焦点 ; 等离子体聚焦 ; 装置</subject><ispartof>Chinese physics B, 2014-06, Vol.23 (6), p.381-386</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c312t-b18d17ca8f50f41652100008ad96a53506c5a8d2bfdd3e060a0379ec9ced23463</citedby><cites>FETCH-LOGICAL-c312t-b18d17ca8f50f41652100008ad96a53506c5a8d2bfdd3e060a0379ec9ced23463</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttp://image.cqvip.com/vip1000/qk/85823A/85823A.jpg</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids></links><search><creatorcontrib>Ahmad, R.</creatorcontrib><creatorcontrib>Hussain, T.</creatorcontrib><creatorcontrib>Khan, I. A.</creatorcontrib><creatorcontrib>Rawat, R. S.</creatorcontrib><title>Synthesis of ZrSiN composite films using a plasma focus device</title><title>Chinese physics B</title><addtitle>Chinese Physics</addtitle><description>ZrSiN thin films are synthesized by using plasma focus through various numbers of focus shots （10, 20, and 30）, with samples placed at 9 cm away from the tip of the anode. Crystal structures, surface morphologies, and elemental compositions of ZrSiN films are characterized by an X-ray diffractometer （XRD） and scanning electron microscope （SEM） attached with energy dispersive X-ray spectroscopy （EDS）. XRD patterns confirm the formations of polycrystalline ZrSiN films. Crystallinity of nitride increases with the increase of focus shot number. The average crystallite size of zirconium nitride increases from 27 ± 3 nm to 73±8 nm and microstrain decreases from 2.28 to 1.0 with the increase of the focus shot number. SEM results exhibit the formations of granular and oval-shaped microstructures, depending on the number of focus shots. EDS results confirm the presences of silicon, zirconium, nitrogen, and oxygen in the composite films. The content values of Zr and N in the composite films increase with the increase of the focus shot number.</description><subject>Crystallites</subject><subject>Devices</subject><subject>Formations</subject><subject>Plasma focus</subject><subject>Scanning electron microscopy</subject><subject>Shot</subject><subject>SiN薄膜</subject><subject>X-ray diffraction</subject><subject>XRD图谱</subject><subject>Zirconium</subject><subject>合成</subject><subject>复合薄膜</subject><subject>扫描电子显微镜</subject><subject>等离子体焦点</subject><subject>等离子体聚焦</subject><subject>装置</subject><issn>1674-1056</issn><issn>2058-3834</issn><issn>1741-4199</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><recordid>eNo9kD1PwzAQhi0EEqHwE5DMxhJytmPHWZBQxZdUwVBYWCzXsVujJE7jBKn_nlStesst7_Pq7kHolsADASkzIoo8JcBFRlkmMhCcQn6GEgpcpkyy_Bwlp8wluorxF0AQoCxBj8tdO2xs9BEHh3_6pf_AJjRdiH6w2Pm6iXiMvl1jjbtax0ZjF8wYcWX_vLHX6MLpOtqb456h75fnr_lbuvh8fZ8_LVLDCB3SFZEVKYyWjoPLyXQggWmkrkqhOeMgDNeyoitXVcyCAA2sKK0pja0oywWboftDb9eH7WjjoBofja1r3dowRkUKQUGUlLEpyg9R04cYe-tU1_tG9ztFQO19qb0LtXehKFNCHXxN3N2R24R2vZ1ePoF5KYHnomT_59Jn5Q</recordid><startdate>20140601</startdate><enddate>20140601</enddate><creator>Ahmad, R.</creator><creator>Hussain, T.</creator><creator>Khan, I. A.</creator><creator>Rawat, R. S.</creator><scope>2RA</scope><scope>92L</scope><scope>CQIGP</scope><scope>~WA</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>H8D</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20140601</creationdate><title>Synthesis of ZrSiN composite films using a plasma focus device</title><author>Ahmad, R. ; Hussain, T. ; Khan, I. A. ; Rawat, R. S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c312t-b18d17ca8f50f41652100008ad96a53506c5a8d2bfdd3e060a0379ec9ced23463</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Crystallites</topic><topic>Devices</topic><topic>Formations</topic><topic>Plasma focus</topic><topic>Scanning electron microscopy</topic><topic>Shot</topic><topic>SiN薄膜</topic><topic>X-ray diffraction</topic><topic>XRD图谱</topic><topic>Zirconium</topic><topic>合成</topic><topic>复合薄膜</topic><topic>扫描电子显微镜</topic><topic>等离子体焦点</topic><topic>等离子体聚焦</topic><topic>装置</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ahmad, R.</creatorcontrib><creatorcontrib>Hussain, T.</creatorcontrib><creatorcontrib>Khan, I. A.</creatorcontrib><creatorcontrib>Rawat, R. S.</creatorcontrib><collection>中文科技期刊数据库</collection><collection>中文科技期刊数据库-CALIS站点</collection><collection>中文科技期刊数据库-7.0平台</collection><collection>中文科技期刊数据库- 镜像站点</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Aerospace Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Chinese physics B</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ahmad, R.</au><au>Hussain, T.</au><au>Khan, I. A.</au><au>Rawat, R. S.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Synthesis of ZrSiN composite films using a plasma focus device</atitle><jtitle>Chinese physics B</jtitle><addtitle>Chinese Physics</addtitle><date>2014-06-01</date><risdate>2014</risdate><volume>23</volume><issue>6</issue><spage>381</spage><epage>386</epage><pages>381-386</pages><issn>1674-1056</issn><eissn>2058-3834</eissn><eissn>1741-4199</eissn><abstract>ZrSiN thin films are synthesized by using plasma focus through various numbers of focus shots （10, 20, and 30）, with samples placed at 9 cm away from the tip of the anode. Crystal structures, surface morphologies, and elemental compositions of ZrSiN films are characterized by an X-ray diffractometer （XRD） and scanning electron microscope （SEM） attached with energy dispersive X-ray spectroscopy （EDS）. XRD patterns confirm the formations of polycrystalline ZrSiN films. Crystallinity of nitride increases with the increase of focus shot number. The average crystallite size of zirconium nitride increases from 27 ± 3 nm to 73±8 nm and microstrain decreases from 2.28 to 1.0 with the increase of the focus shot number. SEM results exhibit the formations of granular and oval-shaped microstructures, depending on the number of focus shots. EDS results confirm the presences of silicon, zirconium, nitrogen, and oxygen in the composite films. The content values of Zr and N in the composite films increase with the increase of the focus shot number.</abstract><doi>10.1088/1674-1056/23/6/065204</doi><tpages>6</tpages></addata></record> |
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| ispartof | Chinese physics B, 2014-06, Vol.23 (6), p.381-386 |
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| language | eng |
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| source | IOP Publishing Journals |
| subjects | Crystallites Devices Formations Plasma focus Scanning electron microscopy Shot SiN薄膜 X-ray diffraction XRD图谱 Zirconium 合成 复合薄膜 扫描电子显微镜 等离子体焦点 等离子体聚焦 装置 |
| title | Synthesis of ZrSiN composite films using a plasma focus device |
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