High-Resolution Dynamic Pressure Sensor Array Based on Piezo-phototronic Effect Tuned Photoluminescence Imaging

A high-resolution dynamic tactile/pressure display is indispensable to the comprehensive perception of force/mechanical stimulations such as electronic skin, biomechanical imaging/analysis, or personalized signatures. Here, we present a dynamic pressure sensor array based on pressure/strain tuned ph...

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Veröffentlicht in:ACS nano 2015-03, Vol.9 (3), p.3143-3150
Hauptverfasser: Peng, Mingzeng, Li, Zhou, Liu, Caihong, Zheng, Qiang, Shi, Xieqing, Song, Ming, Zhang, Yang, Du, Shiyu, Zhai, Junyi, Wang, Zhong Lin
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container_end_page 3150
container_issue 3
container_start_page 3143
container_title ACS nano
container_volume 9
creator Peng, Mingzeng
Li, Zhou
Liu, Caihong
Zheng, Qiang
Shi, Xieqing
Song, Ming
Zhang, Yang
Du, Shiyu
Zhai, Junyi
Wang, Zhong Lin
description A high-resolution dynamic tactile/pressure display is indispensable to the comprehensive perception of force/mechanical stimulations such as electronic skin, biomechanical imaging/analysis, or personalized signatures. Here, we present a dynamic pressure sensor array based on pressure/strain tuned photoluminescence imaging without the need for electricity. Each sensor is a nanopillar that consists of InGaN/GaN multiple quantum wells. Its photoluminescence intensity can be modulated dramatically and linearly by small strain (0–0.15%) owing to the piezo-phototronic effect. The sensor array has a high pixel density of 6350 dpi and exceptional small standard deviation of photoluminescence. High-quality tactile/pressure sensing distribution can be real-time recorded by parallel photoluminescence imaging without any cross-talk. The sensor array can be inexpensively fabricated over large areas by semiconductor product lines. The proposed dynamic all-optical pressure imaging with excellent resolution, high sensitivity, good uniformity, and ultrafast response time offers a suitable way for smart sensing, micro/nano-opto-electromechanical systems.
doi_str_mv 10.1021/acsnano.5b00072
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subjects Dynamic pressure
Dynamical systems
Dynamics
Electricity
Gallium
Imaging
Indium
Nanostructure
Nanotechnology - instrumentation
Optical Imaging
Optical Phenomena
Photoluminescence
Photons
Pressure
Semiconductors
Sensor arrays
title High-Resolution Dynamic Pressure Sensor Array Based on Piezo-phototronic Effect Tuned Photoluminescence Imaging
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