Development of MEMS-based micro capacitive tactile probe
In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus...
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| Veröffentlicht in: | Chinese physics B 2014-11, Vol.23 (11), p.646-650 |
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| container_title | Chinese physics B |
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| creator | 雷李华 李源 范国芳 吴俊杰 简黎 蔡潇雨 李同保 |
| description | In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon technique. Based on the sensor, a micro capacitive tactile probe is constructed by stylus assembly and packaging design for dimension metrology on micro/nano scale, in which a data acquiring system is developed with AD7747. Some measurements of the micro capacitive tactile probe are performed on a nano positioning and measuring machine （NMM）. The measurement results show good linearity and hysteresis with a range of 11.6 μm and resolution of better than 5 nm. Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy. |
| doi_str_mv | 10.1088/1674-1056/23/11/118703 |
| format | Article |
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Hence, the micro capacitive tactile probe can be integrated on NMM to realize measurement of micro structures with nanometer accuracy.</description><subject>Assembly</subject><subject>Construction</subject><subject>Hysteresis</subject><subject>MEMS技术</subject><subject>Metrology</subject><subject>Nanostructure</subject><subject>Packaging design</subject><subject>Sensors</subject><subject>Styli</subject><subject>Tactile</subject><subject>开发</subject><subject>微型</subject><subject>探头</subject><subject>数据获取系统</subject><subject>电容式传感器</subject><subject>纳米级分辨率</subject><subject>超精密测量</subject><issn>1674-1056</issn><issn>2058-3834</issn><issn>1741-4199</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><recordid>eNo9kE1Lw0AQhhdRsFb_ggRPXmJnsp85Sq0f0OJBPS_bzaSu5KvZtOC_N6VSGJjL-8y8PIzdIjwgGDNDpUWKINUs4zPEcYwGfsYmGUiTcsPFOZucQpfsKsYfAIWQ8QkzT7Snqu1qaoakLZPVYvWRrl2kIqmD79vEu875MIQ9JYPzQ6go6fp2TdfsonRVpJv_PWVfz4vP-Wu6fH95mz8uU89RDmlOmIPWUsmcG699XorSr6XmxuVGCG8KAKGopEJA4ZwkyIQAb7j3JDODfMruj3fHr9sdxcHWIXqqKtdQu4sWteRSGFQwRtUxOvaOsafSdn2oXf9rEexBlT1YsAcLNuMW0R5VjeDdP_jdNpttaDYnUqmxRKYk8j_F_2X5</recordid><startdate>20141101</startdate><enddate>20141101</enddate><creator>雷李华 李源 范国芳 吴俊杰 简黎 蔡潇雨 李同保</creator><scope>2RA</scope><scope>92L</scope><scope>CQIGP</scope><scope>~WA</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20141101</creationdate><title>Development of MEMS-based micro capacitive tactile probe</title><author>雷李华 李源 范国芳 吴俊杰 简黎 蔡潇雨 李同保</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c315t-9e19077565938c7c9f4fcb5738a9844c8d0046efed40daa5e02440c83cce52813</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Assembly</topic><topic>Construction</topic><topic>Hysteresis</topic><topic>MEMS技术</topic><topic>Metrology</topic><topic>Nanostructure</topic><topic>Packaging design</topic><topic>Sensors</topic><topic>Styli</topic><topic>Tactile</topic><topic>开发</topic><topic>微型</topic><topic>探头</topic><topic>数据获取系统</topic><topic>电容式传感器</topic><topic>纳米级分辨率</topic><topic>超精密测量</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>雷李华 李源 范国芳 吴俊杰 简黎 蔡潇雨 李同保</creatorcontrib><collection>中文科技期刊数据库</collection><collection>中文科技期刊数据库-CALIS站点</collection><collection>中文科技期刊数据库-7.0平台</collection><collection>中文科技期刊数据库- 镜像站点</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Chinese physics B</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>雷李华 李源 范国芳 吴俊杰 简黎 蔡潇雨 李同保</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Development of MEMS-based micro capacitive tactile probe</atitle><jtitle>Chinese physics B</jtitle><addtitle>Chinese Physics</addtitle><date>2014-11-01</date><risdate>2014</risdate><volume>23</volume><issue>11</issue><spage>646</spage><epage>650</epage><pages>646-650</pages><issn>1674-1056</issn><eissn>2058-3834</eissn><eissn>1741-4199</eissn><abstract>In this paper, a micro capacitive sensor with nanometer resolution is presented for ultra-precision measurement of micro components, which is fabricated by the MEMS （micro electromechanical systems） non-silicon technique. 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| identifier | ISSN: 1674-1056 |
| ispartof | Chinese physics B, 2014-11, Vol.23 (11), p.646-650 |
| issn | 1674-1056 2058-3834 1741-4199 |
| language | eng |
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| source | Institute of Physics Journals |
| subjects | Assembly Construction Hysteresis MEMS技术 Metrology Nanostructure Packaging design Sensors Styli Tactile 开发 微型 探头 数据获取系统 电容式传感器 纳米级分辨率 超精密测量 |
| title | Development of MEMS-based micro capacitive tactile probe |
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