Development of high-precision micro-roundness measuring machine using a high-sensitivity and compact multi-beam angle sensor

•A high accuracy micro roundness measuring machine (micro-RMM) for accurately measurement the roundness profiles has been proposed.•The multi-beam angle sensor (MBAS) has been incorporated in order to improve the motion accuracy of the micro-RMM.•The MBAS is less susceptible to instrumental errors f...

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Veröffentlicht in:	Precision engineering 2015-10, Vol.42, p.276-282
Hauptverfasser:	Chen, Meiyun, Takahashi, Satoru, Takamasu, Kiyoshi
Format:	Artikel
Sprache:	eng
Schlagworte:	Autocollimator Error analysis Feasibility Industrial plants MBA Metrology Micro-RMM Multi-beam angle sensor Roundness Sensors Shape Stage-independence
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