Advanced Nanocluster Ion Source Based on High-Power Impulse Magnetron Sputtering and Time-Resolved Measurements of Nanocluster Formation
We developed a new nanocluster (NC) ion source based on the high-power impulse magnetron sputtering (HiPIMS) technique coupled with a gas flow cell reactor. Silver NC anions (Ag n –) with a maximum intensity of 5.5 nA (Ag11 –) are generated with the size ranging from the atomic anion to the 70-mer,...
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| Veröffentlicht in: | The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory Molecules, spectroscopy, kinetics, environment, & general theory, 2013-10, Vol.117 (40), p.10211-10217 |
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| container_title | The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory |
| container_volume | 117 |
| creator | Zhang, Chuhang Tsunoyama, Hironori Akatsuka, Hiroki Sekiya, Hiroki Nagase, Tomomi Nakajima, Atsushi |
| description | We developed a new nanocluster (NC) ion source based on the high-power impulse magnetron sputtering (HiPIMS) technique coupled with a gas flow cell reactor. Silver NC anions (Ag n –) with a maximum intensity of 5.5 nA (Ag11 –) are generated with the size ranging from the atomic anion to the 70-mer, which is well-controlled by simply adjusting the peak power and repetition rate of the HiPIMS. By time-resolved density profiles of Ag n –, we find that the ion beam generated by HiPIMS is characterized by individual 100 ms duration “bunches” below a repetition rate of 10 Hz, which is well-thermalized with a group velocity of 5 m/s. The high intensity of the NCs is attributable to the high ionization fraction by this HiPIMS ion source, while the underlying mechanism of the flexible size tuning of the ion source is understood by time-resolved mass spectrometry coupled with the sequential growth mechanism; the increment of the density of the target species in the bunches with the peak power and the overlapping of the bunches with the repetition rate cause the formation of large NCs. |
| doi_str_mv | 10.1021/jp406521v |
| format | Article |
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Silver NC anions (Ag n –) with a maximum intensity of 5.5 nA (Ag11 –) are generated with the size ranging from the atomic anion to the 70-mer, which is well-controlled by simply adjusting the peak power and repetition rate of the HiPIMS. By time-resolved density profiles of Ag n –, we find that the ion beam generated by HiPIMS is characterized by individual 100 ms duration “bunches” below a repetition rate of 10 Hz, which is well-thermalized with a group velocity of 5 m/s. The high intensity of the NCs is attributable to the high ionization fraction by this HiPIMS ion source, while the underlying mechanism of the flexible size tuning of the ion source is understood by time-resolved mass spectrometry coupled with the sequential growth mechanism; the increment of the density of the target species in the bunches with the peak power and the overlapping of the bunches with the repetition rate cause the formation of large NCs.</description><identifier>ISSN: 1089-5639</identifier><identifier>EISSN: 1520-5215</identifier><identifier>DOI: 10.1021/jp406521v</identifier><identifier>PMID: 24079920</identifier><language>eng</language><publisher>Washington, DC: American Chemical Society</publisher><subject>Anions ; Atomic and molecular clusters ; Atomic and molecular physics ; Charged clusters ; Cross-disciplinary physics: materials science; rheology ; Density ; Exact sciences and technology ; Formations ; Impulses ; Ion sources ; Magnetron sputtering ; Materials science ; Nanoscale materials and structures: fabrication and characterization ; Nanostructure ; Other topics in nanoscale materials and structures ; Physics ; Repetition ; Studies of special atoms, molecules and their ions; clusters</subject><ispartof>The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory, 2013-10, Vol.117 (40), p.10211-10217</ispartof><rights>Copyright © 2013 American Chemical Society</rights><rights>2015 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-a444t-28e260823adf04582d471da5863b7d4c217f6560d5460614034dd2f615cfa82a3</citedby><cites>FETCH-LOGICAL-a444t-28e260823adf04582d471da5863b7d4c217f6560d5460614034dd2f615cfa82a3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://pubs.acs.org/doi/pdf/10.1021/jp406521v$$EPDF$$P50$$Gacs$$H</linktopdf><linktohtml>$$Uhttps://pubs.acs.org/doi/10.1021/jp406521v$$EHTML$$P50$$Gacs$$H</linktohtml><link.rule.ids>314,776,780,2752,27053,27901,27902,56713,56763</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=27895646$$DView record in Pascal Francis$$Hfree_for_read</backlink><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/24079920$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Zhang, Chuhang</creatorcontrib><creatorcontrib>Tsunoyama, Hironori</creatorcontrib><creatorcontrib>Akatsuka, Hiroki</creatorcontrib><creatorcontrib>Sekiya, Hiroki</creatorcontrib><creatorcontrib>Nagase, Tomomi</creatorcontrib><creatorcontrib>Nakajima, Atsushi</creatorcontrib><title>Advanced Nanocluster Ion Source Based on High-Power Impulse Magnetron Sputtering and Time-Resolved Measurements of Nanocluster Formation</title><title>The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory</title><addtitle>J. Phys. Chem. A</addtitle><description>We developed a new nanocluster (NC) ion source based on the high-power impulse magnetron sputtering (HiPIMS) technique coupled with a gas flow cell reactor. Silver NC anions (Ag n –) with a maximum intensity of 5.5 nA (Ag11 –) are generated with the size ranging from the atomic anion to the 70-mer, which is well-controlled by simply adjusting the peak power and repetition rate of the HiPIMS. By time-resolved density profiles of Ag n –, we find that the ion beam generated by HiPIMS is characterized by individual 100 ms duration “bunches” below a repetition rate of 10 Hz, which is well-thermalized with a group velocity of 5 m/s. The high intensity of the NCs is attributable to the high ionization fraction by this HiPIMS ion source, while the underlying mechanism of the flexible size tuning of the ion source is understood by time-resolved mass spectrometry coupled with the sequential growth mechanism; the increment of the density of the target species in the bunches with the peak power and the overlapping of the bunches with the repetition rate cause the formation of large NCs.</description><subject>Anions</subject><subject>Atomic and molecular clusters</subject><subject>Atomic and molecular physics</subject><subject>Charged clusters</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Density</subject><subject>Exact sciences and technology</subject><subject>Formations</subject><subject>Impulses</subject><subject>Ion sources</subject><subject>Magnetron sputtering</subject><subject>Materials science</subject><subject>Nanoscale materials and structures: fabrication and characterization</subject><subject>Nanostructure</subject><subject>Other topics in nanoscale materials and structures</subject><subject>Physics</subject><subject>Repetition</subject><subject>Studies of special atoms, molecules and their ions; clusters</subject><issn>1089-5639</issn><issn>1520-5215</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><recordid>eNqFkd1KxDAQhYMorq5e-ALSG0EvqkmapO2lin_gH7pel9kkXbu0SU3aFd_AxzbLri6C4NXMMN-cgXMQ2iP4mGBKTqYtw4JTMltDW4RTHIeer4ceZ3nMRZIP0Lb3U4wxSSjbRAPKcJrnFG-hz1M1AyO1iu7BWFn3vtMuurEmera9kzo6Ax-WYb6uJq_xo32fr5u2r72O7mBidOfmcNt34bAykwiMikZVo-Mn7W09C8d3GnzvdKNN5yNb_vp0aV0DXWXNDtooIYjuLusQvVxejM6v49uHq5vz09sYGGNdTDNNBc5oAqrEjGdUsZQo4JlIxqlikpK0FFxgxZnAgjCcMKVoKQiXJWQUkiE6XOi2zr712ndFU3mp6xqMtr0vSMqTYB8R4n-UsYRRHowM6NEClc5673RZtK5qwH0UBBfzjIqfjAK7v5Ttx41WP-R3KAE4WALgJdSlCwFVfsWlWc4FEysOpC-mIS4TjPvj4RfY_KVc</recordid><startdate>20131010</startdate><enddate>20131010</enddate><creator>Zhang, Chuhang</creator><creator>Tsunoyama, Hironori</creator><creator>Akatsuka, Hiroki</creator><creator>Sekiya, Hiroki</creator><creator>Nagase, Tomomi</creator><creator>Nakajima, Atsushi</creator><general>American Chemical Society</general><scope>IQODW</scope><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7X8</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20131010</creationdate><title>Advanced Nanocluster Ion Source Based on High-Power Impulse Magnetron Sputtering and Time-Resolved Measurements of Nanocluster Formation</title><author>Zhang, Chuhang ; Tsunoyama, Hironori ; Akatsuka, Hiroki ; Sekiya, Hiroki ; Nagase, Tomomi ; Nakajima, Atsushi</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-a444t-28e260823adf04582d471da5863b7d4c217f6560d5460614034dd2f615cfa82a3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2013</creationdate><topic>Anions</topic><topic>Atomic and molecular clusters</topic><topic>Atomic and molecular physics</topic><topic>Charged clusters</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Density</topic><topic>Exact sciences and technology</topic><topic>Formations</topic><topic>Impulses</topic><topic>Ion sources</topic><topic>Magnetron sputtering</topic><topic>Materials science</topic><topic>Nanoscale materials and structures: fabrication and characterization</topic><topic>Nanostructure</topic><topic>Other topics in nanoscale materials and structures</topic><topic>Physics</topic><topic>Repetition</topic><topic>Studies of special atoms, molecules and their ions; clusters</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Zhang, Chuhang</creatorcontrib><creatorcontrib>Tsunoyama, Hironori</creatorcontrib><creatorcontrib>Akatsuka, Hiroki</creatorcontrib><creatorcontrib>Sekiya, Hiroki</creatorcontrib><creatorcontrib>Nagase, Tomomi</creatorcontrib><creatorcontrib>Nakajima, Atsushi</creatorcontrib><collection>Pascal-Francis</collection><collection>PubMed</collection><collection>CrossRef</collection><collection>MEDLINE - Academic</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>The journal of physical chemistry. 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A</addtitle><date>2013-10-10</date><risdate>2013</risdate><volume>117</volume><issue>40</issue><spage>10211</spage><epage>10217</epage><pages>10211-10217</pages><issn>1089-5639</issn><eissn>1520-5215</eissn><abstract>We developed a new nanocluster (NC) ion source based on the high-power impulse magnetron sputtering (HiPIMS) technique coupled with a gas flow cell reactor. Silver NC anions (Ag n –) with a maximum intensity of 5.5 nA (Ag11 –) are generated with the size ranging from the atomic anion to the 70-mer, which is well-controlled by simply adjusting the peak power and repetition rate of the HiPIMS. By time-resolved density profiles of Ag n –, we find that the ion beam generated by HiPIMS is characterized by individual 100 ms duration “bunches” below a repetition rate of 10 Hz, which is well-thermalized with a group velocity of 5 m/s. The high intensity of the NCs is attributable to the high ionization fraction by this HiPIMS ion source, while the underlying mechanism of the flexible size tuning of the ion source is understood by time-resolved mass spectrometry coupled with the sequential growth mechanism; the increment of the density of the target species in the bunches with the peak power and the overlapping of the bunches with the repetition rate cause the formation of large NCs.</abstract><cop>Washington, DC</cop><pub>American Chemical Society</pub><pmid>24079920</pmid><doi>10.1021/jp406521v</doi><tpages>7</tpages></addata></record> |
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| subjects | Anions Atomic and molecular clusters Atomic and molecular physics Charged clusters Cross-disciplinary physics: materials science rheology Density Exact sciences and technology Formations Impulses Ion sources Magnetron sputtering Materials science Nanoscale materials and structures: fabrication and characterization Nanostructure Other topics in nanoscale materials and structures Physics Repetition Studies of special atoms, molecules and their ions clusters |
| title | Advanced Nanocluster Ion Source Based on High-Power Impulse Magnetron Sputtering and Time-Resolved Measurements of Nanocluster Formation |
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