Dynamics Model of Micro-Displacement Stage Based on High-Frequency

The optical structure has a large number of micro-structures, which has multiple arrays, complex free-form surface features. But those can not be achieved the requirements with traditional turning and grinding processing, it require to use high-frequency and micro-feed to get ultra-precision machini...

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Veröffentlicht in:	Key engineering materials 2014-08, Vol.625, p.167-171
Hauptverfasser:	Li, Ke Tian, Chen, Xin Du, Chen, Xin, Zhou, Huan Wei
Format:	Artikel
Sprache:	eng
Schlagworte:	Acceleration Arrays Computer aided engineering Computer programs Linearity Machining Mathematical models Nanostructure Platforms
Online-Zugang:	Volltext
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