Tailored Height Gradients in Vertical Nanowire Arrays via Mechanical and Electronic Modulation of Metal-Assisted Chemical Etching

In current top‐down nanofabrication methodologies the design freedom is generally constrained to the two lateral dimensions, and is only limited by the resolution of the employed nanolithographic technique. However, nanostructure height, which relies on certain mask‐dependent material deposition or...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Small (Weinheim an der Bergstrasse, Germany) Germany), 2015-09, Vol.11 (33), p.4201-4208
Hauptverfasser:	Otte, M. A., Solis-Tinoco, V., Prieto, P., Borrisé, X., Lechuga, L. M., González, M. U., Sepulveda, B.
Format:	Artikel
Sprache:	eng
Schlagworte:	Arrays arrays, chemical etching Biomechanical Phenomena Biosensing Techniques - instrumentation Biosensing Techniques - methods Catalysis Catalysts Chemical etching Electrical Equipment and Supplies Electrochemical etching Electrochemical Techniques - methods Electronics Etching Gold Gold - chemistry height gradients metamaterials Microtechnology - methods nanofabrication Nanostructure Nanostructures - chemistry Nanotechnology Nanotechnology - methods Nanowires Nanowires - chemistry Surface Properties
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!