Process optimization in high-average-power ultrashort pulse laser microfabrication: how laser process parameters influence efficiency, throughput and quality

In this paper, laser processing of technical grade stainless steel and copper using high-average-power ultrashort pulse lasers is studied in order to gain deeper insight into material removal for microfabrication. A high-pulse repetition frequency picosecond and femtosecond laser is used in conjunct...

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Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2015-09, Vol.120 (3), p.847-855
Hauptverfasser:	Schille, Joerg, Schneider, Lutz, Loeschner, Udo
Format:	Artikel
Sprache:	eng
Schlagworte:	Characterization and Evaluation of Materials Condensed Matter Physics Copper Femtosecond Holes Lasers Machines Machining Manufacturing Nanotechnology Optical and Electronic Materials Physics Physics and Astronomy Process parameters Processes Scanning electron microscopy Stainless steels Surfaces and Interfaces Thin Films
Online-Zugang:	Volltext
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