Impact of substrate composition on the morphology and conductivity of laser-crystallized silicon films

We present a combined theoretical and experimental study of the morphology and conductivity of thin silicon films crystallized with a 355-nm-pulsed laser from amorphous silicon on a variety of substrates. Amorphous silicon (a-Si) films were grown through plasma-enhanced chemical vapor deposition and...

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Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2015-09, Vol.120 (4), p.1545-1553
Hauptverfasser:	Semler, Matthew R., Hoey, Justin M., Guruvenket, Srinivasan, Swenson, Orven F., Hobbie, Erik K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous silicon Characterization and Evaluation of Materials Computer simulation Condensed Matter Physics Crystallization Lasers Machines Manufacturing Mathematical analysis Morphology Nanotechnology Optical and Electronic Materials Physics Physics and Astronomy Processes Silicon films Silicon substrates Surfaces and Interfaces Thin Films
Online-Zugang:	Volltext
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