Uncertainty quantification analysis of the dynamics of an electrostatically actuated microelectromechanical switch model

This work presents an uncertainty quantification (UQ) analysis of a comprehensive model for an electrostatically actuated microelectromechanical system (MEMS) switch. The goal is to elucidate the effects of parameter variations on certain key performance characteristics of the switch. A sufficiently...

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Bibliographische Detailangaben

Veröffentlicht in:	Journal of sound and vibration 2015-08, Vol.349, p.375-388
Hauptverfasser:	Snow, Michael G., Bajaj, Anil K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Computer simulation Electric potential Mathematical models Monte Carlo methods Probability density functions Response surfaces Switches Voltage
Online-Zugang:	Volltext
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