Note: Thermally stable thin-film filters for high-power extreme-ultraviolet applications

We investigated several types of thin-film filters for high intensity work in the extreme-ultraviolet (EUV) spectral range. In our application, with a peak EUV intensity of 2.7 W cm(-2), Ni-mesh-backed Zr filters have a typical lifetime of 20 h, at which point they suffer from pinholes and a 50% los...

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Veröffentlicht in:	Review of scientific instruments 2015-11, Vol.86 (11), p.116103-116103
Hauptverfasser:	Tarrio, C, Berg, R F, Lucatorto, T B, Lairson, B, Lopez, H, Ayers, T
Format:	Artikel
Sprache:	eng
Schlagworte:	Mathematical analysis Pinholes Scientific apparatus & instruments Silicon Thermal stability Thin films Ultraviolet spectra Zirconium
Online-Zugang:	Volltext
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