Note: Thermally stable thin-film filters for high-power extreme-ultraviolet applications

We investigated several types of thin-film filters for high intensity work in the extreme-ultraviolet (EUV) spectral range. In our application, with a peak EUV intensity of 2.7 W cm(-2), Ni-mesh-backed Zr filters have a typical lifetime of 20 h, at which point they suffer from pinholes and a 50% los...

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Veröffentlicht in:Review of scientific instruments 2015-11, Vol.86 (11), p.116103-116103
Hauptverfasser: Tarrio, C, Berg, R F, Lucatorto, T B, Lairson, B, Lopez, H, Ayers, T
Format: Artikel
Sprache:eng
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Zusammenfassung:We investigated several types of thin-film filters for high intensity work in the extreme-ultraviolet (EUV) spectral range. In our application, with a peak EUV intensity of 2.7 W cm(-2), Ni-mesh-backed Zr filters have a typical lifetime of 20 h, at which point they suffer from pinholes and a 50% loss of transmission. Initial trials with Si filters on Ni meshes resulted in rupture of the filters in less than an hour. A simple thermal calculation showed that the temperature rise in those filters to be about 634 K. A similar calculation indicated that using a finer mesh with thicker wires and made of Cu reduces the temperature increase to about 60 K. We have exposed a Si filter backed by such a mesh for more than 60 h with little loss of transmission and no leaks.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.4935468