Auger Electron Spectroscopy in high vacuum: Nanocharacterisation in the Scanning Electron Microscope
It is generally regarded as impossible to carry out Auger Electron Spectroscopy (AES) analysis in a scanning electron microscope (SEM) due to the high ambient gas pressure in an SEM. This is because standard electron energy analysers such as the Concentric Hemispherical Analyser (CHA) or Cylindrical...
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| Veröffentlicht in: | Journal of physics. Conference series 2014-01, Vol.522 (1), p.12027-5 |
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| creator | Zha, Xiaoping Walker, Christopher G H El-Gomati, Mohamed |
| description | It is generally regarded as impossible to carry out Auger Electron Spectroscopy (AES) analysis in a scanning electron microscope (SEM) due to the high ambient gas pressure in an SEM. This is because standard electron energy analysers such as the Concentric Hemispherical Analyser (CHA) or Cylindrical Mirror Analyser (CMA) are devices that acquire data in a serial manner that can last up to few minutes. This is considered too slow for high vacuum (10−6mbar) and a previously cleaned surface would be re-contaminated before a spectrum could be completed. This has led to AES being traditionally carried out under ultrahigh vacuum (UHV) environment. We report on two devices for fast acquisition of AES data characterising nanoscale objects by the use of AES in an SEM. |
| doi_str_mv | 10.1088/1742-6596/522/1/012027 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_1730088233</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2576684058</sourcerecordid><originalsourceid>FETCH-LOGICAL-c364t-710c28ac412eb12d4863c5e3c5493be5e5e55c2cfbd4d6380782119bce0e96d03</originalsourceid><addsrcrecordid>eNpdkF1LwzAUhoMoOKd_QQreeDObjzZNvRtjfsDUi-l1SNOzNaNLa9IK-_emViZ4wiEv5D0vOQ9C1wTfESxETLKEznia8zilNCYxJhTT7ARNjg-nRy3EObrwfocxC5VNUDnvt-CiZQ26c42N1u2P8LppD5GxUWW2VfSldN_v76NXZRtdKad0B8541ZkwEUxdBdFaK2uN3f5FvRg9BsElOtuo2sPV7z1FHw_L98XTbPX2-LyYr2aa8aSbZQRrKpROCIWC0DIRnOkUQic5KyAdTqqp3hRlUnImcCYoIXmhAUPOS8ym6HbMbV3z2YPv5N54DXWtLDS9lyRjOBCjYfUpuvln3TW9s-F3kqYZ5yLBqQguPrqGTbyDjWyd2St3kATLAb4cuMqBsQzwJZEjfPYNX9x3-A</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2576684058</pqid></control><display><type>article</type><title>Auger Electron Spectroscopy in high vacuum: Nanocharacterisation in the Scanning Electron Microscope</title><source>IOP Publishing Free Content</source><source>Elektronische Zeitschriftenbibliothek - Frei zugängliche E-Journals</source><source>IOPscience extra</source><source>Alma/SFX Local Collection</source><source>Free Full-Text Journals in Chemistry</source><creator>Zha, Xiaoping ; Walker, Christopher G H ; El-Gomati, Mohamed</creator><creatorcontrib>Zha, Xiaoping ; Walker, Christopher G H ; El-Gomati, Mohamed</creatorcontrib><description>It is generally regarded as impossible to carry out Auger Electron Spectroscopy (AES) analysis in a scanning electron microscope (SEM) due to the high ambient gas pressure in an SEM. This is because standard electron energy analysers such as the Concentric Hemispherical Analyser (CHA) or Cylindrical Mirror Analyser (CMA) are devices that acquire data in a serial manner that can last up to few minutes. This is considered too slow for high vacuum (10−6mbar) and a previously cleaned surface would be re-contaminated before a spectrum could be completed. This has led to AES being traditionally carried out under ultrahigh vacuum (UHV) environment. We report on two devices for fast acquisition of AES data characterising nanoscale objects by the use of AES in an SEM.</description><identifier>ISSN: 1742-6588</identifier><identifier>EISSN: 1742-6596</identifier><identifier>DOI: 10.1088/1742-6596/522/1/012027</identifier><language>eng</language><publisher>Bristol: IOP Publishing</publisher><subject>Auger electron spectroscopy ; Auger spectroscopy ; Cleaning ; Devices ; Electron energy analysers ; Electron microscopes ; Electron spectroscopy ; Electronic devices ; Gas pressure ; High vacuum ; Nanostructure ; Physics ; Scanning electron microscopy ; Serials ; Spectrum analysis ; Ultrahigh vacuum</subject><ispartof>Journal of physics. Conference series, 2014-01, Vol.522 (1), p.12027-5</ispartof><rights>2014. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c364t-710c28ac412eb12d4863c5e3c5493be5e5e55c2cfbd4d6380782119bce0e96d03</citedby><cites>FETCH-LOGICAL-c364t-710c28ac412eb12d4863c5e3c5493be5e5e55c2cfbd4d6380782119bce0e96d03</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27903,27904</link.rule.ids></links><search><creatorcontrib>Zha, Xiaoping</creatorcontrib><creatorcontrib>Walker, Christopher G H</creatorcontrib><creatorcontrib>El-Gomati, Mohamed</creatorcontrib><title>Auger Electron Spectroscopy in high vacuum: Nanocharacterisation in the Scanning Electron Microscope</title><title>Journal of physics. Conference series</title><description>It is generally regarded as impossible to carry out Auger Electron Spectroscopy (AES) analysis in a scanning electron microscope (SEM) due to the high ambient gas pressure in an SEM. This is because standard electron energy analysers such as the Concentric Hemispherical Analyser (CHA) or Cylindrical Mirror Analyser (CMA) are devices that acquire data in a serial manner that can last up to few minutes. This is considered too slow for high vacuum (10−6mbar) and a previously cleaned surface would be re-contaminated before a spectrum could be completed. This has led to AES being traditionally carried out under ultrahigh vacuum (UHV) environment. We report on two devices for fast acquisition of AES data characterising nanoscale objects by the use of AES in an SEM.</description><subject>Auger electron spectroscopy</subject><subject>Auger spectroscopy</subject><subject>Cleaning</subject><subject>Devices</subject><subject>Electron energy analysers</subject><subject>Electron microscopes</subject><subject>Electron spectroscopy</subject><subject>Electronic devices</subject><subject>Gas pressure</subject><subject>High vacuum</subject><subject>Nanostructure</subject><subject>Physics</subject><subject>Scanning electron microscopy</subject><subject>Serials</subject><subject>Spectrum analysis</subject><subject>Ultrahigh vacuum</subject><issn>1742-6588</issn><issn>1742-6596</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2014</creationdate><recordtype>article</recordtype><sourceid>ABUWG</sourceid><sourceid>AFKRA</sourceid><sourceid>AZQEC</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><recordid>eNpdkF1LwzAUhoMoOKd_QQreeDObjzZNvRtjfsDUi-l1SNOzNaNLa9IK-_emViZ4wiEv5D0vOQ9C1wTfESxETLKEznia8zilNCYxJhTT7ARNjg-nRy3EObrwfocxC5VNUDnvt-CiZQ26c42N1u2P8LppD5GxUWW2VfSldN_v76NXZRtdKad0B8541ZkwEUxdBdFaK2uN3f5FvRg9BsElOtuo2sPV7z1FHw_L98XTbPX2-LyYr2aa8aSbZQRrKpROCIWC0DIRnOkUQic5KyAdTqqp3hRlUnImcCYoIXmhAUPOS8ym6HbMbV3z2YPv5N54DXWtLDS9lyRjOBCjYfUpuvln3TW9s-F3kqYZ5yLBqQguPrqGTbyDjWyd2St3kATLAb4cuMqBsQzwJZEjfPYNX9x3-A</recordid><startdate>20140101</startdate><enddate>20140101</enddate><creator>Zha, Xiaoping</creator><creator>Walker, Christopher G H</creator><creator>El-Gomati, Mohamed</creator><general>IOP Publishing</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>ARAPS</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>DWQXO</scope><scope>H8D</scope><scope>HCIFZ</scope><scope>L7M</scope><scope>P5Z</scope><scope>P62</scope><scope>PIMPY</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>7U5</scope><scope>8BQ</scope><scope>JG9</scope></search><sort><creationdate>20140101</creationdate><title>Auger Electron Spectroscopy in high vacuum: Nanocharacterisation in the Scanning Electron Microscope</title><author>Zha, Xiaoping ; Walker, Christopher G H ; El-Gomati, Mohamed</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c364t-710c28ac412eb12d4863c5e3c5493be5e5e55c2cfbd4d6380782119bce0e96d03</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2014</creationdate><topic>Auger electron spectroscopy</topic><topic>Auger spectroscopy</topic><topic>Cleaning</topic><topic>Devices</topic><topic>Electron energy analysers</topic><topic>Electron microscopes</topic><topic>Electron spectroscopy</topic><topic>Electronic devices</topic><topic>Gas pressure</topic><topic>High vacuum</topic><topic>Nanostructure</topic><topic>Physics</topic><topic>Scanning electron microscopy</topic><topic>Serials</topic><topic>Spectrum analysis</topic><topic>Ultrahigh vacuum</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Zha, Xiaoping</creatorcontrib><creatorcontrib>Walker, Christopher G H</creatorcontrib><creatorcontrib>El-Gomati, Mohamed</creatorcontrib><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>Advanced Technologies & Aerospace Collection</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Central Korea</collection><collection>Aerospace Database</collection><collection>SciTech Premium Collection</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Advanced Technologies & Aerospace Database</collection><collection>ProQuest Advanced Technologies & Aerospace Collection</collection><collection>Publicly Available Content Database</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Materials Research Database</collection><jtitle>Journal of physics. Conference series</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Zha, Xiaoping</au><au>Walker, Christopher G H</au><au>El-Gomati, Mohamed</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Auger Electron Spectroscopy in high vacuum: Nanocharacterisation in the Scanning Electron Microscope</atitle><jtitle>Journal of physics. Conference series</jtitle><date>2014-01-01</date><risdate>2014</risdate><volume>522</volume><issue>1</issue><spage>12027</spage><epage>5</epage><pages>12027-5</pages><issn>1742-6588</issn><eissn>1742-6596</eissn><abstract>It is generally regarded as impossible to carry out Auger Electron Spectroscopy (AES) analysis in a scanning electron microscope (SEM) due to the high ambient gas pressure in an SEM. This is because standard electron energy analysers such as the Concentric Hemispherical Analyser (CHA) or Cylindrical Mirror Analyser (CMA) are devices that acquire data in a serial manner that can last up to few minutes. This is considered too slow for high vacuum (10−6mbar) and a previously cleaned surface would be re-contaminated before a spectrum could be completed. This has led to AES being traditionally carried out under ultrahigh vacuum (UHV) environment. We report on two devices for fast acquisition of AES data characterising nanoscale objects by the use of AES in an SEM.</abstract><cop>Bristol</cop><pub>IOP Publishing</pub><doi>10.1088/1742-6596/522/1/012027</doi><tpages>5</tpages><oa>free_for_read</oa></addata></record> |
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| subjects | Auger electron spectroscopy Auger spectroscopy Cleaning Devices Electron energy analysers Electron microscopes Electron spectroscopy Electronic devices Gas pressure High vacuum Nanostructure Physics Scanning electron microscopy Serials Spectrum analysis Ultrahigh vacuum |
| title | Auger Electron Spectroscopy in high vacuum: Nanocharacterisation in the Scanning Electron Microscope |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-26T20%3A47%3A59IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Auger%20Electron%20Spectroscopy%20in%20high%20vacuum:%20Nanocharacterisation%20in%20the%20Scanning%20Electron%20Microscope&rft.jtitle=Journal%20of%20physics.%20Conference%20series&rft.au=Zha,%20Xiaoping&rft.date=2014-01-01&rft.volume=522&rft.issue=1&rft.spage=12027&rft.epage=5&rft.pages=12027-5&rft.issn=1742-6588&rft.eissn=1742-6596&rft_id=info:doi/10.1088/1742-6596/522/1/012027&rft_dat=%3Cproquest_cross%3E2576684058%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2576684058&rft_id=info:pmid/&rfr_iscdi=true |