Study on reactive sputtering of yttrium oxide: Process and thin film properties

This paper investigates the influence of deposition conditions on the properties of yttrium oxide thin films. The paper focuses on the texture, optical and mechanical properties. With this objective, a series of yttrium oxide thin films with different thicknesses were deposited by direct current (DC...

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Veröffentlicht in:	Surface & coatings technology 2015-08, Vol.276, p.39-46
Hauptverfasser:	Lei, Pei, Leroy, Wouter, Dai, Bing, Zhu, Jiaqi, Chen, Xiaoting, Han, Jiecai, Depla, Diederik
Format:	Artikel
Sprache:	eng
Schlagworte:	Columnar structure DC magnetron sputtering Deposition Direct current Magnetron sputtering Mechanical properties Microstructure Optical properties Texture Thin films Yttrium oxide Yttrium oxide thin films
Online-Zugang:	Volltext
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