Atom Probe Tomography of Electronic Materials
The state of application of atom probe tomography to electronic materials is assessed. The benefits and challenges of the technique are discussed with regard to its impact on this field of materials science. Specimen preparation in particular is emphasized as the key to success with modern atom prob...
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| Veröffentlicht in: | Annual review of materials research 2007-01, Vol.37 (1), p.681-727 |
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| container_end_page | 727 |
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| container_issue | 1 |
| container_start_page | 681 |
| container_title | Annual review of materials research |
| container_volume | 37 |
| creator | Kelly, Thomas F Larson, David J Thompson, Keith Alvis, Roger L Bunton, Joseph H Olson, Jesse D Gorman, Brian P |
| description | The state of application of atom probe tomography to electronic materials is assessed. The benefits and challenges of the technique are discussed with regard to its impact on this field of materials science. Specimen preparation in particular is emphasized as the key to success with modern atom probes. Electronic materials referenced in this paper include components of complementary metal/oxide/semiconductor (CMOS) structures, compound semiconductors, and thin films for data storage and general applications. Many examples from recent work are provided as illustrations of the types of information that can be derived and the impact this information can have on the research, development, processing, and failure analysis of electronic materials. |
| doi_str_mv | 10.1146/annurev.matsci.37.052506.084239 |
| format | Article |
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| identifier | ISSN: 1531-7331 |
| ispartof | Annual review of materials research, 2007-01, Vol.37 (1), p.681-727 |
| issn | 1531-7331 1545-4118 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_1730050438 |
| source | Annual Reviews Complete A-Z List |
| subjects | CMOS Data storage Electronic materials Failure analysis Oxides Semiconductors Thin films Tomography |
| title | Atom Probe Tomography of Electronic Materials |
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