Contributed Review: Application of voice coil motors in high-precision positioning stages with large travel ranges

Recent interest in high-precision positioning stages with large travel ranges has sparked renewed attention to the development of voice coil motors (VCMs). Due to their large output force, VCMs can actuate more complicated flexure structures, eliminate rail friction, and improve positioning speed. T...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Review of scientific instruments 2015-10, Vol.86 (10), p.101501-101501
Hauptverfasser:	Shan, Guanqiao, Li, Yingzi, Zhang, Liwen, Wang, Zhenyu, Zhang, Yingxu, Qian, Jianqiang
Format:	Artikel
Sprache:	eng
Schlagworte:	Control methods Flexing Motors Response time Scientific apparatus & instruments Thrust
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!