Nano-holes for vacuum applications

In order to calibrate leak-detection instruments, devices based on permeation leaks and physical leaks are used. Unfortunately, permeation leaks are very sensitive to small temperature fluctuations and can be used only with those gases for which permeating materials are available. While, physical-le...

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Veröffentlicht in:	Journal of physics. Conference series 2013-01, Vol.439 (1), p.12033-8
Hauptverfasser:	Ierardi, V, Firpo, G, Valbusa, U
Format:	Artikel
Sprache:	eng
Schlagworte:	Atomic force microscopy Devices Diameters Estimates Gas flow Image acquisition Image resolution Ion beams Leaks Microscopy Molecular flow Nanostructure Penetration Permeation Physics Plugging Silicon nitride
Online-Zugang:	Volltext
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