Outgassing Measurement for Vacuum Engineering
In this article, two common methods to evaluate the outgassing properties of vacuum system materials, thermal desorption spectroscopy (TDS) and the method of switching between two pumping paths (SPP), are discussed. TDS can evaluate the outgassing properties of small samples, while SPP method can me...
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| Veröffentlicht in: | Journal of the Vacuum Society of Japan 2015, Vol.58(2), pp.57-62 |
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| container_end_page | 62 |
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| container_issue | 2 |
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| container_title | Journal of the Vacuum Society of Japan |
| container_volume | 58 |
| creator | INAYOSHI, Sakae |
| description | In this article, two common methods to evaluate the outgassing properties of vacuum system materials, thermal desorption spectroscopy (TDS) and the method of switching between two pumping paths (SPP), are discussed. TDS can evaluate the outgassing properties of small samples, while SPP method can measure low outgassing rate, such as the case after baking. Ion gauges and/or quadrupole mass spectrometers (QMS) consist of the TDS and SPP setups. In these cases, QMS are typically calibrated using a standard conductance element (SCE). The calibration using the SCE enables the direct conversion of the QMS ion current into the gas flow rate. |
| doi_str_mv | 10.3131/jvsj2.58.57 |
| format | Article |
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Vac. Soc. Jpn.</addtitle><date>2015</date><risdate>2015</risdate><volume>58</volume><issue>2</issue><spage>57</spage><epage>62</epage><pages>57-62</pages><issn>1882-2398</issn><eissn>1882-4749</eissn><abstract>In this article, two common methods to evaluate the outgassing properties of vacuum system materials, thermal desorption spectroscopy (TDS) and the method of switching between two pumping paths (SPP), are discussed. TDS can evaluate the outgassing properties of small samples, while SPP method can measure low outgassing rate, such as the case after baking. Ion gauges and/or quadrupole mass spectrometers (QMS) consist of the TDS and SPP setups. In these cases, QMS are typically calibrated using a standard conductance element (SCE). The calibration using the SCE enables the direct conversion of the QMS ion current into the gas flow rate.</abstract><pub>The Vacuum Society of Japan</pub><doi>10.3131/jvsj2.58.57</doi><tpages>6</tpages><oa>free_for_read</oa></addata></record> |
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| ispartof | Journal of the Vacuum Society of Japan, 2015, Vol.58(2), pp.57-62 |
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| language | jpn |
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| source | J-STAGE Free; EZB-FREE-00999 freely available EZB journals |
| subjects | Calibration Conductance Direct conversion Mass spectrometers Outgassing Quadrupoles Switching |
| title | Outgassing Measurement for Vacuum Engineering |
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