An Overview of Low Vacuum System for the Pressure Range from 1 Pa to 133 Pa

Low vacuum has numerous applications especially in the industrial processes where different gases are mixed under controlled environment. In such cases, the system must have the capability to provide controlled atmosphere which can enhance the quality of the end product. A low vacuum system has been...

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Veröffentlicht in:	Journal of the Vacuum Society of Japan 2015, Vol.58(2), pp.69-71
Hauptverfasser:	HONG, Seung-Soo, KHAN, Wakil
Format:	Artikel
Sprache:	eng ; jpn
Schlagworte:	Austenitic stainless steels Chambers Continuous flow Controlled atmospheres Laboratories Low vacuum Measuring instruments
Online-Zugang:	Volltext
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