Preparation of ZnO thin films by MO-CVD using fibrous bis (acetylacetonato) zinc (II) and ozone
The fibrous bis (acetylacetonato) zinc (II) (Zn(C5H7O2)2·xH2O) was prepared with novel apparatus involved the vaporization and the recrystallization, and was investigated by differential thermal analysis (DTA), flourier transform infrared spectroscopy (FT-IR) with attenuated total reflection (ATR),...
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| Veröffentlicht in: | Journal of physics. Conference series 2013-03, Vol.417 (1), p.12059-6 |
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| container_title | Journal of physics. Conference series |
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| creator | Haga, K Abe, S Takizawa, Y Yubuta, K Shishido, T |
| description | The fibrous bis (acetylacetonato) zinc (II) (Zn(C5H7O2)2·xH2O) was prepared with novel apparatus involved the vaporization and the recrystallization, and was investigated by differential thermal analysis (DTA), flourier transform infrared spectroscopy (FT-IR) with attenuated total reflection (ATR), and the inductively coupled plasma optical emission spectroscopy (ICP-OES). The zinc oxide (ZnO) films were prepared by the low-pressure CVD (LP-CVD) using the fibrous Zn(C5H7O2)2·xH2O and ozone(O3). The DTA curve of the fibrous material with a wide-ranging endothermic peak under 100°C according to desorption of the hydrated water separated to two peaks decreasing in the evaporation temperature. The resistivity of the ZnO films has changed widely from 104 to 108 Ωcm by the fibrous material with a different preparation condition. |
| doi_str_mv | 10.1088/1742-6596/417/1/012059 |
| format | Article |
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The zinc oxide (ZnO) films were prepared by the low-pressure CVD (LP-CVD) using the fibrous Zn(C5H7O2)2·xH2O and ozone(O3). The DTA curve of the fibrous material with a wide-ranging endothermic peak under 100°C according to desorption of the hydrated water separated to two peaks decreasing in the evaporation temperature. 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The resistivity of the ZnO films has changed widely from 104 to 108 Ωcm by the fibrous material with a different preparation condition.</description><subject>Chemical vapor deposition</subject><subject>Differential thermal analysis</subject><subject>Endothermic reactions</subject><subject>Inductively coupled plasma</subject><subject>Infrared analysis</subject><subject>Infrared spectroscopy</subject><subject>Low pressure</subject><subject>Molybdenum</subject><subject>Optical emission spectroscopy</subject><subject>Ozone</subject><subject>Physics</subject><subject>Recrystallization</subject><subject>Spectrum analysis</subject><subject>Thin films</subject><subject>Vaporization</subject><subject>Zinc</subject><subject>Zinc oxide</subject><subject>Zinc oxides</subject><issn>1742-6596</issn><issn>1742-6588</issn><issn>1742-6596</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2013</creationdate><recordtype>article</recordtype><sourceid>ABUWG</sourceid><sourceid>AFKRA</sourceid><sourceid>AZQEC</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><recordid>eNpdkEtLAzEUhYMoWKt_QQJu2sXYvGYyWUp9FSp1oS7chEwmoynTpCYzi_bXm6EiYhY3l3M_LuceAC4xusaoLGeYM5IVuShmDPMZniFMUC6OwOh3cPynPwVnMa4RounxEZDPwWxVUJ31DvoGvrsV7D6tg41tNxFWO_i0yuZvt7CP1n0ktQq-T7qNcKK06XbtUL1TnZ_CvXUaThaLKVSuhn7vnTkHJ41qo7n4-cfg9f7uZf6YLVcPi_nNMtOMoi4zpBCM8VKxgjOqa0RzQiqtjCrTUayqa0RK1DSIGE0FR4IqYWhdJQ1xlld0DCaHvdvgv3oTO7mxUZu2Vc4kwxJzXAqSFzlL6NU_dO374JI7SXLOiaAEk0QVB0oHH2MwjdwGu1FhJzGSQ-5yiFQOkcpkUWJ5yJ1-A8OJc1w</recordid><startdate>20130301</startdate><enddate>20130301</enddate><creator>Haga, K</creator><creator>Abe, S</creator><creator>Takizawa, Y</creator><creator>Yubuta, K</creator><creator>Shishido, T</creator><general>IOP Publishing</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>ARAPS</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>DWQXO</scope><scope>H8D</scope><scope>HCIFZ</scope><scope>L7M</scope><scope>P5Z</scope><scope>P62</scope><scope>PIMPY</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>7U5</scope><scope>8BQ</scope><scope>JG9</scope></search><sort><creationdate>20130301</creationdate><title>Preparation of ZnO thin films by MO-CVD using fibrous bis (acetylacetonato) zinc (II) and ozone</title><author>Haga, K ; 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The resistivity of the ZnO films has changed widely from 104 to 108 Ωcm by the fibrous material with a different preparation condition.</abstract><cop>Bristol</cop><pub>IOP Publishing</pub><doi>10.1088/1742-6596/417/1/012059</doi><tpages>6</tpages><oa>free_for_read</oa></addata></record> |
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| subjects | Chemical vapor deposition Differential thermal analysis Endothermic reactions Inductively coupled plasma Infrared analysis Infrared spectroscopy Low pressure Molybdenum Optical emission spectroscopy Ozone Physics Recrystallization Spectrum analysis Thin films Vaporization Zinc Zinc oxide Zinc oxides |
| title | Preparation of ZnO thin films by MO-CVD using fibrous bis (acetylacetonato) zinc (II) and ozone |
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